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Growth and Characterization of Ito Thin Film by Magnetron Sputtering

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ISBN-10: 3838365690

ISBN-13: 9783838365695

Edition: N/A

Authors: �cal Tuna

List price: $61.00
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In this study Indium Tin Oxide (ITO) thin films were grown by both DC and RF magnetron sputtering techniques. To know deposition rate of ITO, system was calibrated for both DCMS and RFMS and then ITO were grown on glass substrate with the thickness of 70 nm and 40 nm by changing substrate temperature. The effect of substrate temperature, film thickness and sputtering method on structural, electrical and optical properties were investigated. The results show that substrate temperature and film thickness substantially affects the film properties,especially crystallization and resistivity. The thin films grown at the lower than 150 oC showed amorphous structure. However,crystallization was…    
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Book details

List price: $61.00
Publisher: Lap Lambert Academic Publishing GmbH & Company KG
Binding: Paperback
Pages: 100
Size: 6.00" wide x 9.00" long x 0.24" tall
Weight: 0.352
Language: English