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Devices, Structures, and Processes for Optical Mems

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ISBN-10: 3836485117

ISBN-13: 9783836485111

Edition: 2008

Authors: Hyuck Choo

List price: $11.00
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I describe results from my research on optical MEMS at Berkeley Sensor Actuator Center. High precision microlenses (200~1000m diameters), fabricated utilizing hydrophobic effects and polymer-printing technology, have 343~7862m focal lengths and show /5~/80 wavefront aberrations at 635nm. Batch-processed polarization-beam splitters, made from low-stress Si3N4, produced extinction ratios of 16dB and 21dB at =635nm for transmitted and reflected light, respectively. Micromachined frequency-addressed microlens array can expand the dynamic range of a Shack-Hartmann (S-H) wavefront sensor beyond 144mrad, an improvement at least by a factor of 10 over conventional systems. High performance…    
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Book details

List price: $11.00
Copyright year: 2008
Publisher: AV Akademikerverlag GmbH & Co. KG
Binding: Paperback
Pages: 228
Size: 6.00" wide x 9.00" long x 0.48" tall
Weight: 0.748
Language: English