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High Power RF Instrumentation Techniques Design Considerations for High Accuracy, High Power RF Instrumentation.

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ISBN-10: 383647414X

ISBN-13: 9783836474146

Edition: N/A

Authors: Ovidiu Stan

List price: $89.00
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The increasing requirements for semiconductor (smaller geometry/high density) and flat panel/solar panel industry (large surface) are pushing the limits for level and accuracy of RF power delivery. RF instrumentation has to provide essential parameters to accurately (less then 1%) monitor and control the actual plasma impedance and RF power delivered to the plasma. The topics included in this book range from the basic elements of RF instrumentation to advanced signal processing and RF metrology. Absolute accuracy of the RF metrology is compounded by errors introduced by the measurement system, by the chosen calibration method and by power references. RF high power standards are not…    
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Book details

List price: $89.00
Publisher: AV Akademikerverlag GmbH & Co. KG
Binding: Paperback
Pages: 172
Size: 6.00" wide x 9.00" long x 0.37" tall
Weight: 0.572