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Ellipsometry for Industrial Applications

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ISBN-10: 321182040X

ISBN-13: 9783211820407

Edition: 1988

Authors: Karl Riedling

List price: $44.99
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During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film…    
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Book details

List price: $44.99
Copyright year: 1988
Publisher: Springer Wien
Publication date: 12/14/1987
Binding: Paperback
Pages: 99
Size: 6.69" wide x 9.61" long
Weight: 0.528