| |
| |
| Preface | |
| |
| |
| Objectives | |
| |
| |
| Topics and use of the book | |
| |
| |
| Acknowledgements | |
| |
| |
| |
| An Environment of Challenges | |
| |
| |
| |
| Overview | |
| |
| |
| |
| A history of modern electronic devices | |
| |
| |
| |
| An issue of scale | |
| |
| |
| |
| Defining electronic materials | |
| |
| |
| |
| Purity | |
| |
| |
| |
| Performance | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework problems | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| |
| The Physics of Solids | |
| |
| |
| |
| Electronic band structures of solids | |
| |
| |
| |
| Free electrons in solids | |
| |
| |
| |
| Free electrons in a periodic potential | |
| |
| |
| |
| Nearly free electrons | |
| |
| |
| |
| Energy vs. momentum in 3d | |
| |
| |
| |
| Electrons and holes | |
| |
| |
| |
| Direct and indirect semiconductors | |
| |
| |
| |
| Effective mass | |
| |
| |
| |
| Density of states | |
| |
| |
| |
| Intrinsic and extrinsic semiconductors | |
| |
| |
| |
| Intrinsic semiconductors | |
| |
| |
| |
| Extrinsic semiconductors | |
| |
| |
| |
| Properties and the band structure | |
| |
| |
| |
| Resistance, capacitance, and inductance | |
| |
| |
| |
| Optical properties | |
| |
| |
| |
| Thermal properties | |
| |
| |
| |
| Quantum wells and confined carriers | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| |
| Overview of Electronic Devices | |
| |
| |
| |
| Diffusion and drift of carriers | |
| |
| |
| |
| Chemical potential | |
| |
| |
| |
| Carrier motion in a chemical potential gradient | |
| |
| |
| |
| Simple diodes | |
| |
| |
| |
| The junction contact potential | |
| |
| |
| |
| Biased junctions | |
| |
| |
| |
| Non-ideal diode behaviors | |
| |
| |
| |
| Schottky barriers and ohmic contacts | |
| |
| |
| |
| Ideal metal/semiconductor junctions | |
| |
| |
| |
| Real schottky diodes | |
| |
| |
| |
| Semiconductor heterojunctions | |
| |
| |
| |
| Heterojunctions at equilibrium | |
| |
| |
| |
| Heterojunctions as diodes | |
| |
| |
| |
| Transistors | |
| |
| |
| |
| Bipolar junction transistors | |
| |
| |
| |
| Field-effect transistors | |
| |
| |
| |
| Light-emitting devices | |
| |
| |
| |
| Light-emitting diodes | |
| |
| |
| |
| Laser diodes | |
| |
| |
| |
| Summary | |
| |
| |
| |
| Homework problems | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| |
| Aspects of Materials Science | |
| |
| |
| |
| Structures of materials | |
| |
| |
| |
| Crystal lattices | |
| |
| |
| |
| The reciprocal lattice | |
| |
| |
| |
| Basic thermodynamics of materials | |
| |
| |
| |
| Phase diagrams | |
| |
| |
| |
| Kinetics | |
| |
| |
| |
| Reaction kinetics | |
| |
| |
| |
| Nucleation | |
| |
| |
| |
| Atomic transport | |
| |
| |
| |
| Organic molecules | |
| |
| |
| |
| Applications | |
| |
| |
| |
| A basis for phase transformations | |
| |
| |
| |
| Silicon crystal fabrication | |
| |
| |
| |
| Rapid thermal processing | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework | |
| |
| |
| |
| Suggested Readings and References | |
| |
| |
| |
| Engineering Electronic Structure | |
| |
| |
| |
| Linking atomic orbitals to bands | |
| |
| |
| |
| Homopolar semiconductors | |
| |
| |
| |
| Heteropolar compounds | |
| |
| |
| |
| LCAO: from atomic orbitals to bands | |
| |
| |
| |
| Common semiconductor energy bands | |
| |
| |
| |
| Pressure and temperature dependence | |
| |
| |
| |
| Applications | |
| |
| |
| |
| Experimental band structures | |
| |
| |
| |
| Gunn diodes | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| |
| Semiconductor Alloys | |
| |
| |
| |
| Alloy selection | |
| |
| |
| |
| Overview | |
| |
| |
| |
| Choosing alloy constituents | |
| |
| |
| |
| Semiconductor alloy thermodynamics | |
| |
| |
| |
| Regular solution theory revisited | |
| |
| |
| |
| Ternary and quaternary solutions | |
| |
| |
| |
| More mechanisms for alloy ordering | |
| |
| |
| |
| Band gap bowing | |
| |
| |
| |
| Binary and pseudobinary alloys | |
| |
| |
| |
| Bowing in quaternary alloys | |
| |
| |
| |
| Silicon-germanium alloys | |
| |
| |
| |
| Structure and solubility | |
| |
| |
| |
| Band gap engineering | |
| |
| |
| |
| Alloying and carrier mobility | |
| |
| |
| |
| Metastable semiconductor alloys | |
| |
| |
| |
| Applications | |
| |
| |
| |
| Heterojunction bipolar transistors | |
| |
| |
| |
| Solar cells | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| |
| Defects in Semiconductors | |
| |
| |
| |
| Point defects | |
| |
| |
| |
| Electronic states due to point defects | |
| |
| |
| |
| Shallow levels | |
| |
| |
| |
| Depth of intrinsic defects | |
| |
| |
| |
| Ionization of defects | |
| |
| |
| |
| Point defect densities | |
| |
| |
| |
| Vacancies and dopant diffusivity | |
| |
| |
| |
| Line defects | |
| |
| |
| |
| Strain relief in heterostructures | |
| |
| |
| |
| Energetics of strain relief | |
| |
| |
| |
| Misfit dislocations | |
| |
| |
| |
| Dislocation dynamics | |
| |
| |
| |
| Reducing problems due to strain relief | |
| |
| |
| |
| Planar and volume defects | |
| |
| |
| |
| Twins and stacking faults | |
| |
| |
| |
| Surfaces, interfaces, grain boundaries | |
| |
| |
| |
| Volume defects | |
| |
| |
| |
| SiC: a case study in stacking faults | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| |
| Amorphous Semiconductors | |
| |
| |
| |
| Structure and bonding | |
| |
| |
| |
| Hydrogenated amorphous Si | |
| |
| |
| |
| Deposition methods for a-Si | |
| |
| |
| |
| Electronic properties | |
| |
| |
| |
| Carrier transport and mobility | |
| |
| |
| |
| Mobility measurements | |
| |
| |
| |
| Doping | |
| |
| |
| |
| Short-range order | |
| |
| |
| |
| Optical properties | |
| |
| |
| |
| Amorphous semiconductor Alloys | |
| |
| |
| |
| Applications | |
| |
| |
| |
| Thin film transistors | |
| |
| |
| |
| Solar cells | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework | |
| |
| |
| |
| Suggested readings and references | |
| |
| |
| |
| Organic Semiconductors | |
| |
| |
| |
| Materials overview | |
| |
| |
| |
| Conjugated organic materials | |
| |
| |
| |
| Ionized organic molecular structures | |
| |
| |
| |
| Overview of organic devices | |
| |
| |
| |
| Light emitting devices | |
| |
| |
| |
| Transistors | |
| |
| |
| |
| Molecular optoelectronic materials | |
| |
| |
| |
| Molecular electron transporters | |
| |
| |
| |
| Molecular hole transporters | |
| |
| |
| |
| Dye molecules | |
| |
| |
| |
| Molecules for thin film transistors | |
| |
| |
| |
| Polymer optoelectronic organics | |
| |
| |
| |
| Polymers for organic light emitting devices | |
| |
| |
| |
| Polymers for transistors | |
| |
| |
| |
| Contact to organic materials | |
| |
| |
| |
| The cathode contact | |
| |
| |
| |
| The anode contact | |
| |
| |
| |
| Defects in organic materials | |
| |
| |
| |
| Patterning organic materials | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| |
| Thin Film Growth Processes | |
| |
| |
| |
| Growth processes | |
| |
| |
| |
| Gas phase transport | |
| |
| |
| |
| Adsorption | |
| |
| |
| |
| Desorption | |
| |
| |
| |
| Sticking coefficient & surface coverage | |
| |
| |
| |
| Nucleation & growth of thin films | |
| |
| |
| |
| Surface diffusion | |
| |
| |
| |
| Surface energy | |
| |
| |
| |
| Morphology determined by nucleation | |
| |
| |
| |
| Microstructure evolution | |
| |
| |
| |
| Residual stress and adhesion | |
| |
| |
| |
| Applications | |
| |
| |
| |
| Adsorption, desorption and binding of H to Si | |
| |
| |
| |
| Surface processes in GaAs epitaxial growth | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework problems | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| |
| Physical Vapor Deposition | |
| |
| |
| |
| Evaporation | |
| |
| |
| |
| Basic system geometries | |
| |
| |
| |
| Sources | |
| |
| |
| |
| Vapor pressure | |
| |
| |
| |
| Monitoring deposition rates | |
| |
| |
| |
| Simple rate monitoring methods | |
| |
| |
| |
| Reflection high-energy electron diffraction | |
| |
| |
| |
| Sputtering | |
| |
| |
| |
| Sputtering yield | |
| |
| |
| |
| Energetic particles | |
| |
| |
| |
| Sputtering systems | |
| |
| |
| |
| Glow discharge basics | |
| |
| |
| |
| Fast particle modification of films | |
| |
| |
| |
| Application | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework problems | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| |
| Chemical Vapor Deposition | |
| |
| |
| |
| Overview | |
| |
| |
| |
| CVD apparatus | |
| |
| |
| |
| Gas flow in CVD reactors | |
| |
| |
| |
| Reactant selection and design | |
| |
| |
| |
| Stimulated CVD | |
| |
| |
| |
| Selective CVD | |
| |
| |
| |
| Atomic layer deposition | |
| |
| |
| |
| Sample CVD and ALD processes | |
| |
| |
| |
| Summary points | |
| |
| |
| |
| Homework problems | |
| |
| |
| |
| Suggested readings & references | |
| |
| |
| Appendix | |
| |
| |
| Useful constants | |
| |
| |
| Units | |
| |
| |
| Unit conversions | |
| |
| |
| Index | |