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Introduction to Vacuum Technology

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ISBN-10: 0130450189

ISBN-13: 9780130450180

Edition: 2008

Authors: David M. Hata

List price: $59.99
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Description:

The approach taken in this book is to approach vacuum systems from a pressure regime viewpoint. That is, after covering some basic chemistry, the first pressure regime covered is the rough vacuum regime. Within the study of rough vacuum systems, the following topics are covered: the gas load, the pumping mechanism, pressure measurement and vacuum system construction. The discussion of rough vacuum is then followed by the study of high-vacuum systems. The same topics are revisited, but this time from a high vacuum perspective. Once both rough vacuum and high vacuum systems are covered, then the topics of leak detection and residual gas analysis are introduced. This approach lends itself to…    
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Book details

List price: $59.99
Copyright year: 2008
Publisher: Prentice Hall PTR
Publication date: 1/30/2007
Binding: Paperback
Pages: 200
Size: 7.25" wide x 9.00" long x 0.50" tall
Weight: 0.682

Much Ado About Vacuum
Introduction
What Is a Vacuum?
Benefits of a Vacuum
Processes That Use a Vacuum
Creating a Vacuum
Looking Ahead
The Behavior of Gases
Introduction
States of Matter
Kinetic Theory of Gases
Ideal Gas Law
Gas Pressure
Mean Free Path
Adsorption and Desorption
Diffusion and Permeation
Thermal Conductivity
Vapor Pressure
Summary
An Introduction to Vacuum Systems
Introduction
Gas Loads
Vacuum Chamber
Vacuum Pumps
Vacuum Gauges
Vacuum System Components
Conductance
A Simple Vacuum System
Characterizing Vacuum Systems
Summary
Rough Vacuum Regime
Introduction
Gas Load in the Rough Vacuum Regime
Pumping Down a Rough Vacuum System
Rough Vacuum Pumps
Rough Vacuum Gauges
Valves and Fittings
Rough Vacuum Pump Downs
Conductance
Troubleshooting Rough Vacuum Systems
Summary
The High-Vacuum Regime
Introduction
Gas Load in the High-Vaccum Regime
High-Vacuum Systems
High-Vacuum Pumps
High-Vacuum Gauges
Conductance
High-Vacuum Pump Downs
Water in High-Vacuum Systems
Summary
Partial Pressure Analysis Using Residual Gas Analyzers
Introduction
Construction and Operation of a Quadrupole RGA
Partial Pressure Measurement
Interpreting Mass Spectra
Uses of a Residual Gas Analyzer
Summary
Leak Detection in Vacuum Systems
Introduction
Leak Detection Methods
Helium Mass Spectrometer Leak Detectors
Calibration and Standard Leaks
Selecting a Helium Leak Detector
Using an RGA for Leak Detection
Summary
Gas Delivery and Pressure Control
Introduction
Gas Delivery
Mass Flow Controllers
Downstream Pressure Control
Upstream Pressure Control
Summary
Safety Issues in Vacuum Systems
Introduction
Electrical Hazards
Mechanical Hazards
Vaccum Hazards
Thermal Hazards
Pressurized Devices
Chemical Hazards
Summary
Index
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