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About the Editor | |
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List of Contributors | |
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Volume Listing | |
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Methods of Deposition of Hydrogenated Amorphous Silicon for Device Applications | |
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Introduction | |
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Research and Industrial Equipment | |
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Physics and Chemistry of PECVD | |
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Plasma Modeling | |
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Plasma Analysis | |
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Relation between Plasma Parameters and Material Properties | |
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Deposition Models | |
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Modifications of PECVD | |
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Hot Wire Chemical Vapor Deposition | |
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Expanding Thermal Plasma Chemical Vapor Deposition | |
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Applications | |
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Conclusion | |
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Acknowledgments | |
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References | |
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Atomic Layer Deposition | |
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Introduction | |
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Alternative Names | |
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Basic Features of ALD | |
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ALD Reactors | |
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ALD Precursors | |
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Film Materials and Applications | |
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Characterization of ALD Processes | |
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Summary | |
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References | |
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Laser Applications in Transparent Conducting Oxide Thin Films Processing | |
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Introduction | |
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General Electrical Properties of TCO Films | |
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Excimer Lasers | |
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PLD Deposition Technique | |
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Properties of PLD Indium Oxide Films | |
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Properties of PLD ITO Films | |
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Laser Irradiation | |
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Other TCO Materials--Zinc Oxide (ZnO) Thin Films | |
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Applications of PLD ITO Films | |
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Conclusion | |
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References | |
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Cold Plasma Processes in Surface Science and Technology | |
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Introduction | |
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Applications | |
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Outlook | |
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Acknowledgments | |
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References | |
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Electrochemical Formation of Thin Films of Binary III-V Compounds | |
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Introduction | |
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Group III-V Compounds | |
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Electrodeposition | |
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Codeposition: Basic Considerations | |
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Codeposition from Aqueous Solutions | |
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Codeposition from Molten Salts | |
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Sequential Electrodeposition | |
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Electrodeposition of Group III-V Compounds | |
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Diffusion Process and Formation of Group III-V Compounds | |
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Influence of the Substrate Structure and Morphology on the Diffusion Process | |
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Conclusions | |
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Acknowledgments | |
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References | |
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Fundamentals for the Formation and Structure Control of Thin Films: Nucleation, Growth, Solid-State Transformations | |
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Introduction | |
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Theory of Nucleation and Growth | |
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Measurement of Nucleation and Growth | |
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Control of Nucleation and Growth | |
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Acknowledgments | |
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References | |
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Ion Implant Doping and Isolation of GaN and Related Materials | |
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Introduction | |
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Range Statistics | |
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Donor Implants (Si, O, S, Se, and Te) | |
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Acceptor Implants | |
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Damage Removal | |
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High Temperature Annealing | |
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Diffusivity of Implanted Species | |
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p-n Junction Formation | |
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Isolation | |
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Devices | |
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Acknowledgment | |
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References | |
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Plasma Etching of GaN and Related Materials | |
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Introduction | |
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Plasma Reactors | |
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Plasma Chemistries | |
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Etch Profile And Etched Surface Morphology | |
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Plasma-Induced Damage | |
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Device Processing | |
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Acknowledgments | |
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References | |
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Residual Stresses in Physically Vapor-Deposited Thin Films | |
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Introduction | |
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Microstructure and Morphology of PVD Thin Films | |
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Magnitude of Residual Stresses in PVD Thin Films | |
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Origin of Residual Stresses in PVD Thin Films | |
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Effect of Major Process Parameters on the Intrinsic Stress | |
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Data on Residual Stresses in PVD Thin Films | |
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Summary and Conclusion | |
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References | |
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Langmuir-Blodgett Films of Biological Molecules | |
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Introduction | |
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Principles of the Langmuir-Blodgett Technique | |
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Techniques for Studying Monolayers and LB Films | |
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Protein Films | |
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Conclusions | |
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Acknowledgment | |
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References | |
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Structure Formation During Electrocrystallization of Metal Films | |
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Introduction | |
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Classification of the Structural Defects in Electrodeposits | |
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Mechanism of Formation of Structural Defects during Noncoherent Nucleation | |
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Classical Theory of Noncoherent Nucleation | |
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Atomistic Analysis of Noncoherent Nucleation | |
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Factors Influencing the Structure of Electrodeposits (Theoretical and Experimental Results) | |
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Mechanism of Multitwinning | |
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Conclusions | |
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Acknowledgment | |
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References | |
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Epitaxial Thin Films of Intermetallic Compounds | |
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Introduction | |
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MBE Growth of Intermetallic Compounds | |
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Selected Applications in Basic and Applied Research | |
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Outlook | |
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Acknowledgments | |
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References | |
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Pulsed Laser Deposition of Thin Films: Expectations and Reality | |
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Introduction | |
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Composition of Pulsed Laser-Deposited Films | |
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Structure of PLD Films | |
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Polymorphism in PLD Films | |
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Macrodefects in PLD Films | |
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Influence of Target Properties on Some Features of PLD Compound Films | |
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General Conclusions | |
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Acknowledgments | |
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References | |
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Single-Crystal [beta]''-Alumina Films | |
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Introduction | |
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Review of the Literature on Large-Area Thin Films of [beta]''/[beta]-Al[subscript 2]O[subscript 3] | |
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| |
Na-[beta]''-Al[subscript 2]O[subscript 3] Single-Crystal Film Growth | |
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Single-Crystal Film Characterization | |
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| |
Na-[beta]''-Al[subscript 2]O[subscript 3]-Coated, [alpha]-Al[subscript 2]O[subscript 3] Single-Crystal Platelets | |
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| |
| |
The Growth of K-[beta]'-Al[subscript 2]O[subscript 3] Single-Crystal Films | |
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| |
| |
Ion Exchange Preparation of Other [beta]''-Al[subscript 2]O[subscript 3] Isomorphs in Single-Crystal Film Form | |
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| |
| |
Luminescence Investigation of Cu[superscript +]-Doped, Single-Crystal [beta]''-Al[subscript 2]O[subscript 3] Films | |
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| |
| |
Summary | |
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| |
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Appendix | |
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| |
Acknowledgment | |
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| |
References | |
| |
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Index | |
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About the Editor | |
| |
| |
List of Contributors | |
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Volume Listing | |
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| |
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Classification of Cluster Morphologies | |
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| |
Structures Developing during Film Growth | |
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Structures Developing after Completed Deposition | |
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| |
References | |
| |
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| |
Band Structure and Orientation of Molecular Adsorbates on Surfaces by Angle-Resolved Electron Spectroscopies | |
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| |
Introduction | |
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Crystallinity and the Reciprocal Lattice | |
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Experimental Measurements of Electronic Band Structure | |
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Symmetry and Selection Rules | |
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Band Dispersion | |
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Carbon Monoxide Monolayers | |
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Molecular Nitrogen | |
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Nitrosyl Bonding | |
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Molecular Oxygen | |
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Di-Halogen Adsorption | |
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Ammonia | |
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Water | |
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NO[subscript 2], SO[subscript 2], CO[subscript 2] | |
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Formate | |
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| |
Methanol (Methoxy), Methanethiol (Thiolate), and Related Species | |
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| |
Ethylene and Acetylene | |
| |
| |
| |
Cyanogen and CN | |
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| |
| |
Benzene, Pyridine, and Small Aromatics | |
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| |
Carboranes | |
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| |
Metallocenes | |
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| |
Phthalocyanines and Porphyrins | |
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| |
Large Aromatic Hydrocarbons and Organic Species | |
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| |
Organic Polymers and "One" Dimensional Conductors | |
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| |
Band Structure of Buckyball Films on Metals and Semiconductors | |
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Conclusion | |
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| |
Acknowledgments | |
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| |
References | |
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| |
Superhard Coatings in C-B-N Systems: Growth and Characterization | |
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Introduction | |
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Diamond | |
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| |
Cubic Boron Nitride | |
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Carbon Nitride Thin Films | |
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| |
Acknowledgments | |
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| |
References | |
| |
| |
| |
Atr Spectroscopy of Thin Films | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Fundamental Theory | |
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| |
| |
Orientation Measurements | |
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| |
| |
Special Experimental Techniques | |
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| |
| |
Applications | |
| |
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| |
Conclusions | |
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| |
Weak-Absorption Approximation | |
| |
| |
References | |
| |
| |
| |
Ion-Beam Characterization in Superlattices | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Rutherford Backscattering Spectrometry (RBS) | |
| |
| |
| |
Ion-Beam Channeling Technique | |
| |
| |
| |
Application of Ion-Beam Techniques to Superlattice (I) | |
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| |
Application of Ion-Beam Techniques to Superlattice (II) | |
| |
| |
References | |
| |
| |
| |
In Situ and Real-Time Spectroscopic Ellipsometry Studies: Carbon Based and Metallic TiN[subscript x] Thin Films Growth | |
| |
| |
| |
| |
Introduction | |
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| |
| |
Theoretical Background of Ellipsometry for Study of the Properties of Materials | |
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| |
Macroscopic Dielectric Function, Effective-Medium Theory, and Microscopic Surface Roughness | |
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| |
Ellipsometric Techniques and Extension of Ellipsometry from the IR to the Deep UV Range | |
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| |
Ellipsometric Studies of Carbon-Based Thin Films | |
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| |
Optical Characterization and Real-Time Monitoring of the Growth of Metallic TiN[subscript x] Films | |
| |
| |
| |
Summary and Conclusions | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
In Situ Faraday-Modulated Fast-Nulling Single-Wavelength Ellipsometry of the Growth of Semiconductor, Dielectric, and Metal Thin Films | |
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| |
| |
Introduction to Ellipsometry | |
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| |
Experimental Techniques | |
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| |
| |
Experimental Results | |
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Conclusions | |
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| |
| |
Method of Summation | |
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| |
Method of Resultant Waves | |
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| |
Relation between Ellipsometric Parameters [Delta] and [psi] and the Null Ellipsometer Variables P and A | |
| |
| |
References | |
| |
| |
| |
Photocurrent Spectroscopy of Thin Passive Films | |
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| |
| |
Introduction | |
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| |
Metal-Electrolyte and Semiconductor-Electrolyte Interfaces | |
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| |
The Passive-Film-Electrolyte Interface | |
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Quantitative Use of PCS for the Characterization of Passive Films on Metals and Alloys | |
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| |
Acknowledgments | |
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| |
References | |
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| |
Electron Energy Loss Spectroscopy for Surface Study | |
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| |
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| |
Introduction | |
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| |
| |
General Scattering Theory | |
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| |
| |
Many-Body Electron Scattering Theory | |
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| |
Optical Potentials | |
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| |
Theory of Deep Core Excitation EELS | |
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| |
Thermal Effects on EELFS | |
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| |
Concluding Remarks | |
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| |
Acknowledgments | |
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| |
References | |
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| |
Theory of Low-Energy Electron Diffraction and Photoelectron Spectroscopy From Ultra-Thin Films | |
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Introduction | |
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Thin Films and Quantized Electronic States | |
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Low-Energy Electron Diffraction | |
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| |
Photoelectron Spectroscopy | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
In Situ Synchrotron Structural Studies of the Growth of Oxides and Metals | |
| |
| |
| |
| |
Introduction | |
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| |
| |
Experimental Techniques | |
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| |
| |
Preparation and Structure of Clean Surfaces | |
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Model Metal/Oxide Systems | |
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Exchange-Coupled Systems | |
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Growth of Nickel Oxide | |
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Conclusions | |
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Acknowledgments | |
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References | |
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Operator Formalism in Polarization-Nonlinear Optics and Spectroscopy of Polarization-Inhomogeneous Media | |
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Fundamentals of the Theory of Ineraction of Vector Light Fields with Nonlinear Media | |
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Tensor-Operator Approach to the Description of Photoanisotropic Media | |
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Fedorov's Light Beam Tensor Formalism for Description of Vector Field Polarization | |
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Propagation of Polarized Radiation in an Anisotropic Medium: Evolution of Probe Wave Intensity | |
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Saturation Spectroscopy | |
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Nonlinear Polarization Spectroscopy | |
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Spectroscopy of Optical Mixing | |
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Principle of Nonlinear Spectroscopic Ellipsometry | |
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Numerical Evaluation of an Effective Nonlinear Susceptibility in the Framework of NSE | |
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The Concept of Normal Waves in Photoanisotropic Media | |
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Method of Combination Waves in NSE | |
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| |
Nonlinear Optical Ellipsometer | |
| |
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Nonlinear Light-Induced Anisotropy of an Isotropic Medium with Partially Polarized Light | |
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| |
Methods for Measuring Nonlinear Susceptibility | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Secondary Ion Mass Spectrometry and its Application to Thin Film Characterization | |
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| |
| |
| |
Introduction | |
| |
| |
| |
Fundamentals of the SIMS Technique | |
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| |
Fractionation Effects | |
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| |
Instrumentation | |
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| |
| |
Factors Characterizing a SIMS Instrument | |
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| |
| |
Quantification | |
| |
| |
| |
Depth Profiling | |
| |
| |
| |
Ion Imaging with SIMS | |
| |
| |
| |
Applications to Thin Film Characterization | |
| |
| |
References | |
| |
| |
| |
A Solid-State Approach to Langmuir Monolayers, Their Phases, Phase Transitions, and Design | |
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| |
| |
| |
Introduction | |
| |
| |
| |
Molecular Model Building | |
| |
| |
| |
Thermodynamics | |
| |
| |
| |
Ferroelasticity of Langmuir Monolayers | |
| |
| |
| |
Free Energy and Order Parameters | |
| |
| |
| |
Application of the General Theory | |
| |
| |
| |
Extensions of the Solid-State Theory of Langmuir Film Phases | |
| |
| |
| |
Computer Simulations | |
| |
| |
| |
Closing Remarks on the Solid-State Model for Langmuir Films | |
| |
| |
| |
Appendix | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Solid State NMR of Biomolecules | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Fundamentals of Solid State NMR Spectroscopy | |
| |
| |
| |
Solid State NMR Techniques | |
| |
| |
| |
Application of Solid State NMR to Biomolecules | |
| |
| |
| |
Concluding Remarks | |
| |
| |
References | |
| |
| |
Index | |
| |
| |
| |
| |
| |
About the Editor | |
| |
| |
List of Contributors | |
| |
| |
Volume Listing | |
| |
| |
| |
The Electrical Properties of High-Dielectric-Constant and Ferroelectric Thin Films for Very Large Scale Integration Circuits | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
High-Dielectric-Constant Films: Tantalum Oxide (Ta[subscript 2]O[subscript 5]) | |
| |
| |
| |
High-Dielectric-Constant Films: Silicon Nitride (Si[subscript 3]N[subscript 4]) | |
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| |
| |
High-Dielectric-Constant Films: Titanium Oxide (TiO[subscript 2]) | |
| |
| |
| |
Other High-Dielectric-Constant Films: Al[subscript 2]O[subscript 3], Y[subscript 2]O[subscript 3], HfO[subscript 2], ZrO[subscript 2], and Gd[subscript 2]O[subscript 3] | |
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| |
| |
Ferroelectric Films: Lead Zirconate Titanate (PZT) | |
| |
| |
| |
Paraelectric Films: Barium Strontium Titanate (BST) | |
| |
| |
| |
Ferroelectric Films: Strontium Bismuth Tantalate (SBT) | |
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| |
| |
Other Ferroelectric and Paraelectric Films | |
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| |
| |
Metal-Ferroelectric-Insulator-Semiconductor Structures | |
| |
| |
| |
Conclusion | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
High-Permittivity (Ba, Sr)TiO[subscript 3] Thin Films | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Thin Film Deposition | |
| |
| |
| |
Physical and Electrical Properties of BST Thin Films | |
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| |
| |
Conduction Mechanisms | |
| |
| |
| |
Dielectric Relaxation and Defect Analysis of BST Thin Films | |
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| |
| |
Reliability | |
| |
| |
| |
Key Technologies for Gigabit DRAMs | |
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| |
| |
Optical Properties | |
| |
| |
| |
Other Possible Applications | |
| |
| |
| |
Summary | |
| |
| |
References | |
| |
| |
| |
Ultrathin Gate Dielectric Films for Si-Based Microelectronic Devices | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Requirements of Ultrathin Gate Dielectric Films | |
| |
| |
| |
Ultrathin Gate Dielectric Film Processing | |
| |
| |
| |
Characterization of Ultrathin Gate Dielectric Films | |
| |
| |
| |
Hydrogen and Ultrathin Gate Dielectric Films | |
| |
| |
| |
Silicon Oxide Gate Dielectric Films | |
| |
| |
| |
Silicon Oxynitride Gate Dielectric Films | |
| |
| |
| |
Alternative (High-k) Gate Dielectric Films | |
| |
| |
| |
Final Remarks | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Piezoelectric Thin Films: Processing and Properties | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Piezoelectricity in Thin Films: Size Effects | |
| |
| |
| |
Growth Techniques | |
| |
| |
| |
Characterization Methods | |
| |
| |
| |
Properties of Piezoelectric Thin Films | |
| |
| |
| |
Conclusions | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Fabrication and Characterization of Ferroelectric Oxide Thin Films | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Overview of Basic Physical Properties of Ferroelectric Oxides | |
| |
| |
| |
Deposition of Ferroelectric Oxide Thin Films | |
| |
| |
| |
Characterization of Ferroelectric Thin Films | |
| |
| |
| |
Summary and Concluding Remarks | |
| |
| |
References | |
| |
| |
| |
Ferroelectric Thin Films of Modified Lead Titanate | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Chemical Solution Deposition of Modified Lead Titanate Thin Films | |
| |
| |
| |
Ferroelectric Characterization Techniques | |
| |
| |
| |
Conclusions and Trends | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Point Defects in Thin Insulating Films of Lithium Fluoride for Optical Microsystems | |
| |
| |
| |
| |
Preface | |
| |
| |
| |
Lithium Fluoride: Material Properties | |
| |
| |
| |
Color Centers in Lithium Fluoride Crystals | |
| |
| |
| |
Laser Active Color Centers in Lithium Fluoride Crystals | |
| |
| |
| |
Lithium Fluoride Films | |
| |
| |
| |
Color Center Formation by Low-Penetrating Particles | |
| |
| |
| |
Coloration of LiF by Low-Energy Electron Beams | |
| |
| |
| |
Kinetics of Low-Energy Electron-Induced Color Center Formation | |
| |
| |
| |
Refractive Index Modification Induced by Color Centers in LiF | |
| |
| |
| |
What about "Thin Films"? | |
| |
| |
| |
Growth of Lithium Fluoride Films | |
| |
| |
| |
Optical Absorption of Colored LiF Films | |
| |
| |
| |
Photoluminescence of Colored LiF Films | |
| |
| |
| |
Influence of LiF Film Structure on Color Center Formation | |
| |
| |
| |
Nonlinear Optical Properties of Colored LiF Films | |
| |
| |
| |
Design of Active Waveguides in LiF | |
| |
| |
| |
Electron-Beam Lithography for Pattern Realization | |
| |
| |
| |
CCs in Alkali Halide Films for Passive Optical Functions | |
| |
| |
| |
CCs in Alkali Halide Films for Active Optical Functions | |
| |
| |
| |
Optical Microscopy on LiF-Based Microstructures | |
| |
| |
| |
Photoluminescence for Optical Microsystem Developments | |
| |
| |
| |
Conclusions | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Polarization Switching of Ferroelectric Crystals | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Processing of Single Domain Crystals | |
| |
| |
| |
Periodical Polarization Switching on Ferroelectrics with High Coercive Field | |
| |
| |
| |
Conclusion | |
| |
| |
References | |
| |
| |
| |
High-Temperature Superconductor and Ferroelectric Thin Films for Microwave Applications | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
High-Temperature Superconducting Materials | |
| |
| |
| |
Introduction to Ferroelectric Materials | |
| |
| |
| |
Summary and Concluding Remarks | |
| |
| |
References | |
| |
| |
| |
Twinning in Ferroelectric Thin Films: Theory and Structural Analysis | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Theory | |
| |
| |
| |
Experimental Methods | |
| |
| |
| |
Correlation Between Experiment and Theory | |
| |
| |
| |
Summary and Concluding Remarks | |
| |
| |
Acknowledgments | |
| |
| |
Appendix | |
| |
| |
References | |
| |
| |
| |
Ferroelectric Polymer Langmuir-Blodgett Films | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Langmuir-Blodgett Film Fabrication | |
| |
| |
| |
Film Structure and Morphology | |
| |
| |
| |
Ferroelectric Properties | |
| |
| |
| |
Applications of Ferroelectric Langmuir-Blodgett Films | |
| |
| |
| |
Conclusions | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Optical Properties of Dielectric and Semiconductor Thin Films | |
| |
| |
| |
| |
Theory | |
| |
| |
| |
Applications of Thin Films | |
| |
| |
| |
Conclusions | |
| |
| |
Acknowledgment | |
| |
| |
References | |
| |
| |
Index | |
| |
| |
| |
| |
| |
About the Editor | |
| |
| |
List of Contributors | |
| |
| |
Volume Listing | |
| |
| |
| |
Electrochemical Passivation of Si and SiGe Surfaces | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
In Situ Characterization of Surface Bond Configurations and Electronic Surface States | |
| |
| |
| |
Electrochemically Hydrogenated Si Surfaces | |
| |
| |
| |
Hydrogenated Porous Silicon | |
| |
| |
| |
Thin Anodic Oxides on Si | |
| |
| |
| |
Thick Anodic Oxides on Si | |
| |
| |
| |
Enhanced Passivation of SiGe by Anodic Oxidation | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Epitaxial Growth and Structure of III-V Nitride Thin Films | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Growth Methods | |
| |
| |
| |
Epitaxial Growth | |
| |
| |
| |
Doping of III-Nitrides | |
| |
| |
| |
Structure and Microstructure of Epitaxial GaN | |
| |
| |
| |
Ternary Alloys | |
| |
| |
References | |
| |
| |
| |
Optical Properties of Highly Excited (Al, In) GaN Epilayers and Heterostructures | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
General Optical Properties of the Group III-Nitrides | |
| |
| |
| |
Pump-Probe Spectroscopy of Highly Excited Group III-Nitrides | |
| |
| |
| |
Gain Mechanisms in Nitride Lasing Structures | |
| |
| |
| |
Optical Properties of InGan-Based Heterostructures | |
| |
| |
| |
Optical Properties of Nitride Thin Films at High Temperatures | |
| |
| |
| |
Microstructure Lasing | |
| |
| |
| |
Imaging Techniques for Wide-Bandgap Semiconductors | |
| |
| |
| |
Summary | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Electrical Conduction Properties of Thin Films of Cadmium Compounds | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Structure | |
| |
| |
| |
Electrical Properties | |
| |
| |
| |
Summary and Conclusions | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Carbon-Containing Heteroepitaxial Silicon and Silicon/Germanium Thin Films on Si(001) | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Growth of Epitaxial Si[subscript 1-y]C[subscript y] and Si[subscript 1-x-y]Ge[subscript x]C[subscript y] | |
| |
| |
| |
Mechanical and Structural Properties | |
| |
| |
| |
Electrical Properties of C-Containing Alloys on Si(001) | |
| |
| |
| |
Highly Concentrated Pseudomorphic Si[subscript 1-y]C[subscript y] Layers | |
| |
| |
| |
Device Application of SiGe:C | |
| |
| |
| |
Summary and Outlook | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Low-Frequency Noise Spectroscopy for Characterization of Poly Crystalline Semiconductor Thin Films and Polysilicon Thin Film Transistors | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Noise of Polycrystalline Semiconductor Thin Films | |
| |
| |
| |
Noise of the Drain Current in Polysilicon TFTs | |
| |
| |
| |
Noise of the Leakage Current in Polysilicon TFTs | |
| |
| |
| |
Avalanche-Induced Excess Noise in Polysilicon TFTs | |
| |
| |
| |
Hot-Carrier Phenomena in Polysilicon TFTs | |
| |
| |
| |
Concluding Remarks | |
| |
| |
References | |
| |
| |
| |
Germanium Thin Films on Silicon for Detection of Near-Infrared Light | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
SiGe Technology | |
| |
| |
| |
SiGe on Si NIR Photodetectors: Historical Overview | |
| |
| |
| |
Functional Devices | |
| |
| |
| |
Numerical Simulation of Relaxed Ge/Si Heterojunctions | |
| |
| |
References | |
| |
| |
| |
Physical Properties of Amorphous Gallium Arsenide | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Deposition and Growth Parameters | |
| |
| |
| |
Composition, Structural, and Morphological Properties | |
| |
| |
| |
Density of States | |
| |
| |
| |
Optical Properties | |
| |
| |
| |
Phonon Spectra | |
| |
| |
| |
Electrical Transport Properties | |
| |
| |
| |
Applications, DEvices | |
| |
| |
| |
List of Symbols | |
| |
| |
References | |
| |
| |
| |
Amorphous Carbon Thin Films | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Deposition and Growth | |
| |
| |
| |
Microstructure | |
| |
| |
| |
Optical Properties | |
| |
| |
| |
Defect Studies of Amorphous Carbon | |
| |
| |
| |
Electrical Properties of Amorphous Carbon | |
| |
| |
| |
Concepts of Localization and Delocalization in a-C | |
| |
| |
| |
Electron Field Emission | |
| |
| |
| |
Amorphous Carbon-Based Devices | |
| |
| |
| |
Conclusion | |
| |
| |
References | |
| |
| |
| |
High-T[subscript c] Superconductor Thin Films | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Fabrication of High-T[subscript c] Superconductor Thin Films | |
| |
| |
| |
High-Temperature Superconductor Thin Films | |
| |
| |
| |
Transport Properties in High-T[subscript c] Superconductor Thin Films | |
| |
| |
| |
Device Applications | |
| |
| |
| |
Heterostructures | |
| |
| |
| |
Conclusion | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Electronic and Optical Properties of Strained Semiconductor Films of Groups IV and III-V Materials | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Deformation Potentials | |
| |
| |
| |
The Tight-Binding Model | |
| |
| |
| |
Strained Si | |
| |
| |
| |
Strained Ge | |
| |
| |
| |
Strained Si[subscript 1-x]Ge[subscript x] Alloys | |
| |
| |
| |
Strained Si[subscript 1-y]C[subscript y] Alloys | |
| |
| |
| |
Si/Ge Superlattices | |
| |
| |
| |
Strained GaAs and InP | |
| |
| |
| |
InAs/AlSb Superlattices | |
| |
| |
| |
Summary | |
| |
| |
References | |
| |
| |
| |
Growth, Structure, and Properties of Plasma-Deposited Amorphous Hydrogenated Carbon-Nitrogen Films | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Amorphous Hydrogenated Carbon Films | |
| |
| |
| |
Nitrogen Incorporation Into a-C:H Films | |
| |
| |
| |
Characterization of a-C(N):H Film Structure | |
| |
| |
| |
Mechanical Properties | |
| |
| |
| |
Optical and Electrical Properties | |
| |
| |
References | |
| |
| |
| |
Conductive Metal Oxide Thin Films | |
| |
| |
| |
| |
Transparent Conducting Oxides | |
| |
| |
| |
Ruthenium Oxide | |
| |
| |
| |
Iridium Oxide | |
| |
| |
| |
Strontium Ruthenate | |
| |
| |
| |
Strontium-Doped Lanthanum Cobaltite | |
| |
| |
| |
Concluding Remarks | |
| |
| |
References | |
| |
| |
Index | |
| |
| |
| |
| |
| |
About the Editor | |
| |
| |
List of Contributors | |
| |
| |
Volume Listing | |
| |
| |
| |
Nanoimprint Techniques | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Hot-Embossing Lithography | |
| |
| |
| |
Mold-Assisted Lithography | |
| |
| |
| |
Microcontact Printing | |
| |
| |
| |
Masters, Stamps, and Molds | |
| |
| |
| |
Sticking Challenge | |
| |
| |
| |
Applications | |
| |
| |
| |
Perspectives | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
The Energy Gap of Clusters, Nanoparticles, and Quantum Dots | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Experimental Techniques | |
| |
| |
| |
Theory | |
| |
| |
| |
Metals | |
| |
| |
| |
Semiconductors | |
| |
| |
| |
Unpassivated Silicon Particles | |
| |
| |
| |
Passivated Silicon Particles | |
| |
| |
| |
Nanowires of Silicon | |
| |
| |
| |
Carbon Particles | |
| |
| |
| |
Thin Films of Particles | |
| |
| |
| |
Applications | |
| |
| |
References | |
| |
| |
| |
Electronic States in GaAs-AlAs Short-Period Superlattices: Energy Levels and Symmetry | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Symmetry of Short-Period Superlattices | |
| |
| |
| |
Photoluminescence and Photoluminescence Excitation Spectra of Short-Period Superlattices | |
| |
| |
| |
Time Decay and Temperature Dependence of Photoluminescence and Photoluminescence Excitation Spectra | |
| |
| |
| |
Photoluminescence Spectrum under Hydrostatic Pressure | |
| |
| |
| |
Short-Period Superlattices in Externally Applied Fields | |
| |
| |
| |
Ultra-Short-Period Superlattices | |
| |
| |
| |
Other Experimental Methods and Other Oriented Short-Period Superlattices | |
| |
| |
| |
Theoretical Research | |
| |
| |
| |
Application of Short-Period Superlattices | |
| |
| |
| |
Summary | |
| |
| |
Acknowledgment | |
| |
| |
References | |
| |
| |
| |
Spin Waves in Thin Films, Superlattices and Multilayers | |
| |
| |
| |
| |
General Introduction | |
| |
| |
| |
Spin Waves in Thin Films | |
| |
| |
| |
Spin Waves in Superlattices and Multilayers | |
| |
| |
| |
Discussion | |
| |
| |
| |
Concluding Remarks | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Quantum Well Interference in Double Quantum Wells | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Single Quantum Wells | |
| |
| |
| |
Mechanisms for Exchange Coupling | |
| |
| |
| |
Symmetric Double Quantum Wells: Bound States | |
| |
| |
| |
Symmetric Double Quantum Wells: Resonant Scattering States | |
| |
| |
| |
Asymmetric Double Quantum Well Cu/Co/Ni/Co(100) | |
| |
| |
| |
Asymmetric Double Quantum Wells Cu/Ni/Cu/Co(100) and Cu/Co/Cu/Co(100) | |
| |
| |
| |
Discussion | |
| |
| |
| |
Concluding Remarks | |
| |
| |
Acknowledgments | |
| |
| |
Appendix A | |
| |
| |
Appendix B | |
| |
| |
Appendix C | |
| |
| |
Appendix D | |
| |
| |
Appendix E | |
| |
| |
Appendix F | |
| |
| |
Appendix G | |
| |
| |
Appendix H | |
| |
| |
References | |
| |
| |
| |
Electro-Optical and Transport Properties of Quasi-Two-Dimensional Nanostructured Materials | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Methods of Synthesis and Fabrication of Quasi-Two-Dimensional Nanostructured Materials | |
| |
| |
| |
Electronic States of the Idealized Quasi-Two-Dimensional Nanostructured Materials | |
| |
| |
| |
Quasi-Particle States in the Quasi-Two-Dimensional Structures | |
| |
| |
| |
Effect of Static External Electric and Magnetic Fields on the Quasi-Particle Energy Levels in the Q2D Systems | |
| |
| |
| |
Dynamics of the Lattice in Q2D Systems: Phonons and Electron-Phonon Interactions | |
| |
| |
| |
Theory of Quantum Transport in Q2D Systems | |
| |
| |
| |
Optical Properties of Q2D Nanostructured Materials | |
| |
| |
| |
Electron Raman Scattering in Q2D Systems | |
| |
| |
| |
Physical Effects of Impurity States and Atomic Systems Confined in Q2D Nanostructured Materials | |
| |
| |
References | |
| |
| |
| |
Magnetism of Nanophase Composite Films | |
| |
| |
| |
| |
Introduction and Scope | |
| |
| |
| |
Nanocomposite Thin Films | |
| |
| |
| |
Cluster-Assembled Thin Films | |
| |
| |
| |
Exchange-Coupled Nanocomposite Hard Magnetic Films | |
| |
| |
| |
Concluding Remarks | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Thin Magnetic Films | |
| |
| |
| |
| |
Magnetism Overview | |
| |
| |
| |
Magnetism of Thin Films | |
| |
| |
| |
Magnetic Film Characterization | |
| |
| |
| |
Magnetic Thin Film Processing | |
| |
| |
| |
Applications of Magnetic Thin Films | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Magnetotransport Effects in Semiconductors | |
| |
| |
| |
Notation | |
| |
| |
| |
Introduction | |
| |
| |
| |
Influence of Magnetic Field on Equilibrium Carrier Density in Semiconductors | |
| |
| |
| |
Hall and Galvanomagnetic Effects | |
| |
| |
| |
Magnetoresistance | |
| |
| |
| |
Quantum Effects in Large Magnetic Fields | |
| |
| |
| |
Magnetotransport in Low-Dimensional Systems and in Heterostructures | |
| |
| |
| |
Experimental Techniques | |
| |
| |
References | |
| |
| |
| |
Thin Films for High-Density Magnetic Recording | |
| |
| |
| |
| |
Instruments for Magnetic Measurement | |
| |
| |
| |
Basic Principles of Magnetic Recording | |
| |
| |
| |
Thin Film Recording Media | |
| |
| |
| |
Thin Films for Replay Heads | |
| |
| |
| |
Films for Write Heads | |
| |
| |
Acknowledgment | |
| |
| |
References | |
| |
| |
| |
Nuclear Resonance in Magnetic Thin Films and Multil Ayers | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Principles of Nuclear Resonance Spectroscopy | |
| |
| |
| |
Hyperfine Interactions and Nuclear Resonance Spectra in Thin Solid Films | |
| |
| |
| |
Experimental Techniques for Thin Film Characterization | |
| |
| |
| |
Nuclear Resonance Study of Metallic Multilayers | |
| |
| |
| |
Nuclear Resonance Spectroscopy in Amorphous, Nanostructured, and Granular Films | |
| |
| |
| |
Concluding Remarks | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
| |
Magnetic Characterization of Superconducting Thin Films | |
| |
| |
| |
| |
Introduction | |
| |
| |
| |
Local and Integral Magnetization Measurements | |
| |
| |
| |
Theoretical Description of the Ideal Flux Patterns | |
| |
| |
| |
Flux Patterns Around Defects and Special Magneto-Optic Experiments | |
| |
| |
| |
Magnetization Measurements | |
| |
| |
| |
Conclusions | |
| |
| |
Acknowledgments | |
| |
| |
References | |
| |
| |
Index | |