Nanofabrication Fundamentals and Applications

Name: Nanofabrication Fundamentals and Applications
Price: 11.99 USD
Availability: InStock
ISBN: 9789812705426

ISBN-10: 9812705422

ISBN-13: 9789812705426

Edition: 2008

Authors: Ampere A. Tseng

List price: $124.00

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Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and…

Book details

List price: $124.00
Copyright year: 2008
Publisher: World Scientific Publishing Co Pte Ltd
Publication date: 2/1/2008
Binding: Paperback
Pages: 574
Size: 6.48" wide x 9.69" long x 0.94" tall
Weight: 2.156
Language: English



Preface



Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy




Atomic Force Microscope Lithography




Scanning Probe Arrays for Nanoscale Imaging, Sensing, and Modification




Using Biomolecules for Self-Assembly of Engineered Nano-Scale Structures and Devices




Nanofabrication Based on Self-Assembled Alumina Templates




Nanowire Assembly and Integration




Taper-Drawing Fabrication of Glass Nanowires




Extreme Ultraviolet Lithography




Electron Projection Lithography




Electron Beam Direct Writing




Electron Beam Induced Deposition




High-Resolution Electron-Beam-Induced Deposition




Focused Ion Beams and Interaction with Solids




Nano/Microstructuring of Ceramic Surfaces by Unconventional Lithographic Methods




Alternative Nanofabrication Approaches for Non-CMOS Applications




Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques



Index