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Practical MEMS Analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and microfluidic Systems

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ISBN-10: 0982299109

ISBN-13: 9780982299104

Edition: 2009

Authors: Ville Kaajakari

List price: $54.00
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Description:

Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive…    
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Book details

List price: $54.00
Copyright year: 2009
Publisher: Small Gear Publishing
Publication date: 4/1/2009
Binding: Hardcover
Pages: 478
Weight: 2.684
Language: English