Fundamentals of Semiconductor Fabrication

Name: Fundamentals of Semiconductor Fabrication
Price: 139.19 USD
Availability: InStock
ISBN: 9780471232797

ISBN-10: 0471232793

ISBN-13: 9780471232797

Edition: 2004

Authors: Gary S. May, Simon M. Sze

List price: $171.95

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Description:

From crystal growth to integrated devices and circuits, this text offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.

Book details

List price: $171.95
Copyright year: 2004
Publisher: John Wiley & Sons, Incorporated
Publication date: 4/11/2003
Binding: Paperback
Pages: 320
Size: 7.22" wide x 10.26" long x 0.74" tall
Weight: 1.804
Language: English




Introduction



Crystal Growth



Silicon Oxidation



Photolithography



Etching



Diffusion



Ion Implantation



Film Deposition



Process Integration



IC Manufacturing



Future Trends and Challenges



List of Symbols



International System of Units




Unit Prefixes



Greek Alphabet



Physical Constants



Properties of Si and GaAs at 300 K



Some Properties of the Error Function



Basic Kinetic Theory of Gases



Suprem Commands



Running Prolith



Percentage Points of the t Distribution



Percentage Points of the F Distribution


Index