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Fundamentals of Semiconductor Fabrication

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ISBN-10: 0471232793

ISBN-13: 9780471232797

Edition: 2004

Authors: Gary S. May, Simon M. Sze

List price: $161.95
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From crystal growth to integrated devices and circuits, this text offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.
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Book details

List price: $161.95
Copyright year: 2004
Publisher: John Wiley & Sons, Incorporated
Publication date: 4/11/2003
Binding: Paperback
Pages: 320
Size: 7.50" wide x 10.25" long x 0.75" tall
Weight: 1.540
Language: English

Crystal Growth
Silicon Oxidation
Ion Implantation
Film Deposition
Process Integration
IC Manufacturing
Future Trends and Challenges
List of Symbols
International System of Units
Unit Prefixes
Greek Alphabet
Physical Constants
Properties of Si and GaAs at 300 K
Some Properties of the Error Function
Basic Kinetic Theory of Gases
Suprem Commands
Running Prolith
Percentage Points of the t Distribution
Percentage Points of the F Distribution