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| Preface | |
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| Introduction | |
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| Microelectromechanical Systems | |
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| Coupled Systems | |
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| Knowledge Required | |
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| Dimensional Analysis | |
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| Problems | |
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| Microfabrication | |
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| Bulk and Surface Micromachining | |
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| Lithography | |
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| Layer Deposition | |
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| Layer Etching | |
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| Fabrication Process Design | |
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| Problems | |
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| Statics | |
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| Static Equilibrium | |
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| Stress-Strain Relationship | |
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| Thermal Stress | |
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| Beam Behavior Subjected to a Torsional Moment | |
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| Moment-Curvature Relationship | |
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| Beam Equation | |
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| Galerkin's Method | |
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| Energy Method | |
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| Energy Method for Beam Problems | |
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| Problems | |
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| Static Behavior of Microstructures | |
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| Elements of Microstructures | |
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| Stiffness of Commonly Used Beams | |
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| Trusses | |
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| Stiffness Transformation | |
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| Static Behavior of Planar Structures | |
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| Residual Stress | |
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| Cubic Force of Structures | |
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| Potential Energy | |
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| Analogy Between Potential Energies | |
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| Problems | |
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| Dynamics | |
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| Cubic Equation | |
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| Description of Motion | |
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| Governing Equations of Dynamics | |
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| Energy Conversion Between Potential and Kinetic Energy | |
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| Free Vibration of Undamped Systems | |
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| Vibration of Damped Systems | |
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| Multidegree-of-freedom systems | |
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| Continuous Systems | |
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| Effective Mass, Damping, and Stiffness | |
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| Systems with Repeated Structures | |
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| Duffing's Equation | |
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| Problems | |
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| Fluid Dynamics | |
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| Viscous Flow | |
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| Continuity Equation | |
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| Navier-Stokes Equation | |
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| Reynolds Equation | |
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| Couette Flow | |
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| Oscillating Plate in a Fluid | |
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| Creeping Flow | |
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| Squeeze Film | |
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| Problems | |
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| Electromagnetics | |
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| Basic Elements of Electric Circuits | |
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| Kirchhoff's Circuit Laws | |
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| Electrostatics | |
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| Force and Moment Due to an Electric Field | |
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| Electrostatic Forces and Moments Acting on Various Objects | |
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| Electromagnetic Force | |
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| Force Acting on a Moving Charge in Electric and Magnetic Fields | |
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| Piezoresistance | |
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| Piezoelectricity | |
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| Problems | |
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| Piezoelectric and Thermal Actuators | |
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| Composite Beams | |
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| Piezoelectric Actuators | |
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| Thermal Actuators | |
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| Problems | |
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| Electrostatic and Electromagnetic Actuators | |
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| Electrostatic Actuators | |
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| Comb Drive Actuator | |
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| Parallel-Plate Actuator | |
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| Torsional Actuator | |
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| Fixed-Fixed Beam Actuator | |
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| Cantilever Beam Actuator | |
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| Dynamic Response of Gap-Closing Actuators | |
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| Approximation of Gap-Closing Actuators | |
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| Electromagnetic Actuators | |
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| Problems | |
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| Sensors | |
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| Force and Pressure Sensors | |
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| Accelerometers | |
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| Electrostatic Accelerometers | |
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| Vibratory Gyroscopes | |
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| Other Issues | |
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| Problems | |
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| Appendix | |
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| References | |
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| Index | |