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| Preface | |
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| Overview of MEMS and Microsystems | |
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| MEMS and Microsystem | |
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| Typical MEMS and Microsystems Products | |
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| Evolution of Microfabrication | |
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| Microsystems and Microelectronics | |
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| The Multidisciplinary Nature of Microsystems Design and Manufacture | |
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| Microsystems and Miniaturization | |
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| Application of Microsystems in Automotive Industry | |
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| Application of Microsystems in Other Industries | |
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| Markets for Microsystems | |
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| Problems | |
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| Working Principles of Microsystems | |
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| Introduction | |
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| Microsensors | |
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| Microactuation | |
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| MEMS with Microactuators | |
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| Microaccelerometers | |
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| Microfluidics | |
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| Problems | |
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| Engineering Science for Microsystems Design and Fabrication | |
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| Introduction | |
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| Atomic Structure of Matters | |
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| Ions and Ionization | |
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| Molecular Theory of Matter and Inter-molecular Forces | |
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| Doping of Semiconductors | |
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| The Diffusion Process | |
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| Plasma Physics | |
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| Electrochemistry | |
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| Problems | |
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| Engineering Mechanics for Microsystems Design | |
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| Introduction | |
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| Static Bending of Thin Plates | |
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| Mechanical Vibration | |
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| Thermomechanics | |
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| Fracture Mechanics | |
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| Thin Film Mechanics | |
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| Overview on Finite Element Stress Analysis | |
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| Problems | |
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| Thermofluid Engineering and Microsystems Design | |
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| Introduction | |
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| Overview on the Basics of Fluid Mechanics in Macro and Mesoscales | |
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| Basic Equations in Continuum Fluid Dynamics | |
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| Laminar Fluid Flow in Circular Conduits | |
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| Computational Fluid Dynamics | |
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| Incompressible Fluid Flow in Microconduits | |
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| Overview on Heat Conduction in Solids | |
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| Heat Conduction in Multi-layered Thin Films | |
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| Heat Conduction in Solids in Submicrometer Scale | |
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| Problems | |
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| Scaling Laws in Miniaturization | |
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| Introduction to Scaling | |
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| Scaling in Geometry | |
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| Scaling in Rigid-Body Dynamics | |
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| Scaling in Electrostatic Forces | |
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| Scaling of Electromagnetic Forces | |
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| Scaling in Electricity | |
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| Scaling in Fluid Mechanics | |
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| Scaling in Heat Transfer | |
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| Problems | |
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| Materials for MEMS and Microsystems | |
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| Introduction | |
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| Substrates and Wafers | |
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| Active Substrate Materials | |
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| Silicon as a Substrate Material | |
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| Silicon Compounds | |
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| Silicon Piezoresistors | |
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| Gallium Arsenide | |
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| Quartz | |
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| Piezoelectric Crystals | |
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| Polymers | |
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| Packaging Materials | |
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| Problems | |
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| Microsystems Fabrication Processes | |
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| Introduction | |
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| Photolithography | |
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| Ion Implantation | |
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| Diffusion | |
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| Oxidation | |
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| Chemical Vapor Deposition | |
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| Physical Vapor Deposition - Sputtering | |
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| Deposition by Epitaxy | |
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| Etching | |
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| Summary of Microfabrication | |
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| Problems | |
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| Overview of Micromanufacturing | |
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| Introduction | |
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| Bulk Micromanufacturing | |
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| Surface Micromachining | |
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| The LIGA Process | |
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| Summary on Micromanufacturing | |
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| Problems | |
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| Microsystem Design | |
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| Introduction | |
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| Design Considerations | |
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| Process Design | |
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| Mechanical Design | |
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| Mechanical Design Using Finite Element Method | |
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| Design of Silicon Die of a Micropressure Sensor | |
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| Design of Microfluidics Network Systems | |
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| Computer-Aided Design | |
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| Problems | |
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| Assembly, Packaging and Testing of Microsystems | |
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| Introduction | |
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| Overview of Microassembly | |
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| The High Costs of Microassembly | |