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Materials Science of Thin Films

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ISBN-10: 0125249756

ISBN-13: 9780125249751

Edition: 2nd 2002 (Revised)

Authors: Milton Ohring

List price: $146.00
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Description:

Updated with developments since 1992, this new edition includes comprehensive coverage of all the latest advances and provides exercises at the end of each chapter.
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Book details

List price: $146.00
Edition: 2nd
Copyright year: 2002
Publisher: Elsevier Science & Technology Books
Publication date: 10/20/2001
Binding: Hardcover
Pages: 794
Size: 6.50" wide x 9.25" long x 1.25" tall
Weight: 2.904

Dr. Milton Ohring, author of two previously acclaimed Academic Press books,The Materials Science of Thin Films (l992) and Engineering Materials Science (1995), has taught courses on reliability and failure in electronics at Bell Laboratories (AT&T and Lucent Technologies). From this perspective and the well-written tutorial style of the book, the reader will gain a deeper physical understanding of failure mechanisms in electronic materials and devices; acquire skills in the mathematical handling of reliability data; and better appreciate future technology trends and the reliability issues they raise.

Foreword to First Edition
Preface
Acknowledgments
A Historical Perspective
A Review of Materials Science
Introduction
Structure
Defects in Solids
Bonds and Bands in Materials
Thermodynamics of Materials
Kinetics
Nucleation
An Introduction to Mechanical Behavior
Conclusion
Exercises
References
Vacuum Science and Technology
Introduction
Kinetic Theory of Gases
Gas Transport and Pumping
Vacuum Pumps
Vacuum Systems
Conclusion
Exercises
References
Thin-Film Evaporation Processes
Introduction
The Physics and Chemistry of Evaporation
Film Thickness Uniformity and Purity
Evaporation Hardware
Evaporation Processes and Applications
Conclusion
Exercises
References
Discharges, Plasmas, and Ion-Surface Interactions
Introduction
Plasmas, Discharges, and Arcs
Fundamentals of Plasma Physics
Reactions in Plasmas
Physics of Sputtering
Ion Bombardment Modification of Growing Films
Conclusion
Exercises
References
Plasma and Ion Beam Processing of Thin Films
Introduction
DC, AC, and Reactive Sputtering Processes
Magnetron Sputtering
Plasma Etching
Hybrid and Modified PVD Processes
Conclusion
Exercises
References
Chemical Vapor Deposition
Introduction
Reaction Types
Thermodynamics of CVD
Gas Transport
Film Growth Kinetics
Thermal CVD Processes
Plasma-Enhanced CVD Processes
Some CVD Materials Issues
Safety
Conclusion
Exercises
References
Substrate Surfaces and Thin-Film Nucleation
Introduction
An Atomic View of Substrate Surfaces
Thermodynamic Aspects of Nucleation
Kinetic Processes in Nucleation and Growth
Experimental Studies of Nucleation and Growth
Conclusion
Exercises
References
Epitaxy
Introduction
Manifestations of Epitaxy
Lattice Misfit and Defects in Epitaxial Films
Epitaxy of Compound Semiconductors
High-Temperature Methods for Depositing Epitaxial Semiconductor Films
Low-Temperature Methods for Depositing Epitaxial Semiconductor Films
Mechanisms and Characterization of Epitaxial Film Growth
Conclusion
Exercises
References
Film Structure
Introduction
Structural Morphology of Deposited Films and Coatings
Computational Simulations of Film Structure
Grain Growth, Texture, and Microstructure Control in Thin Films
Constrained Film Structures
Amorphous Thin Films
Conclusion
Exercises
References
Characterization of Thin Films and Surfaces
Introduction
Film Thickness
Structural Characterization of Films and Surfaces
Chemical Characterization of Surfaces and Films
Conclusion
Exercises
References
Interdiffusion, Reactions, and Transformations in Thin Films
Introduction
Fundamentals of Diffusion
Interdiffusion in Thin Metal Films
Compound Formation and Phase Transformations in Thin Films
Metal-Semiconductor Reactions
Mass Transport in Thin Films under Large Driving Forces
Conclusion
Exercises
References
Mechanical Properties of Thin Films
Introduction
Mechanical Testing and Strength of Thin Films
Analysis of Internal Stress
Techniques for Measuring Internal Stress in Films
Internal Stresses in Thin Films and Their Causes
Mechanical Relaxation Effects in Stressed Films
Adhesion
Conclusion
Exercises
References
Index