An Optical Profilometer for Ultra Highvacuum Conditions: Design, Construction, and Implementation

Name: An Optical Profilometer for Ultra Highvacuum Conditions: Design, Construction, and Implementation
Price: 49.23 USD
Availability: InStock
ISBN: 9783639055559

ISBN-10: 3639055551

ISBN-13: 9783639055559

Edition: 2008

Authors: Katrin Fladischer

List price: $64.00

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Description:

To understand our world, it is essential to know the laws of nature. Over centuries these laws have been deduced from measurements, but there are still a lot of open question. One of these open questions is the exact measurement of profiles under very clean conditions, which is hereby solved. This book describes in detail the design, construction and implementation of an optical profilometer which can measure complex surface profiles under ultra high vacuum conditions. The surface profile (in vacuum) is obtained by scanning an optical sensor across a viewport. The instrument was designed with the aim of characterizing electrostatically deformed silicon wafers. To bend the selected wafers…

Book details

List price: $64.00
Copyright year: 2008
Publisher: Vdm Verlag Dr Mueller E K
Binding: Paperback
Pages: 112
Language: English