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Fabrication of Silicon Microprobes for Optical near-field Applications

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ISBN-10: 1420040707

ISBN-13: 9781420040708

Edition: 2002

Authors: Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

List price: $144.95
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Description:

The development of near-field optics marked a major advance in microscopy and our ability to develop nanoscale technologies. However, the tapered optical fiber widely in use as the optical near-field probe has serious limitations in its fabrication, its optical transmission efficiency, and its use in arrays.Fabrication of Silicon Microprobes for Optical Near-Field Applications reports on several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20…    
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Book details

List price: $144.95
Copyright year: 2002
Publisher: CRC Press
Publication date: 1/1/2002
Binding: E-Book 
Pages: 192
Size: 0.61" wide x 0.93" long
Language: English