Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Name: Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Availability: InStock
ISBN: 9780849331800

ISBN-10: 0849331803

ISBN-13: 9780849331800

Edition: 3rd 2011 (Revised)

Authors: Marc J. Madou, Paola S. Timiras, Anthony Ghiotto

List price: $335.00

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Description:

Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, Fundamentals of Microfabrication includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers.

Book details

List price: $335.00
Edition: 3rd
Copyright year: 2011
Publisher: CRC Press LLC
Publication date: 8/1/2011
Binding: Hardcover
Pages: 1992
Size: 8.75" wide x 11.50" long x 3.25" tall
Weight: 14.146
Language: English