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Fundamentals of Solid State Engineering

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ISBN-10: 0792376293

ISBN-13: 9780792376293

Edition: 2002

Authors: Manijeh Razeghi

List price: $162.00
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Description:

Fundamentals of Solid State Engineering is structured in two major parts. It first addresses the basic physics concepts, which are at the base of solid state matter in general and semiconductors in particular. The second part reviews the technology for modern Solid State Engineering. This includes a review of compound semiconductor bulk and epitaxial thin films growth techniques, followed by a description of current semiconductor device processing and nano-fabrication technologies. A few examples of semiconductor devices and a description of their theory of operational are then discussed, including transistors, semiconductor lasers, and photodetectors.
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Book details

List price: $162.00
Copyright year: 2002
Publisher: Springer
Publication date: 2/28/2002
Binding: Hardcover
Pages: 656
Size: 6.25" wide x 9.25" long x 1.15" tall
Weight: 1.782
Language: English

List of Symbols
Foreword
Preface
Crystalline Properties of Solids
Introduction
Crystal lattices and the seven crystal systems
The unit cell concept
Bravais lattices
Point groups
C[subscript s] group (plane reflection)
C[subscript n] groups (rotation)
C[subscript nh] and C[subscript nv] groups
D[subscript n] groups
D[subscript nh] and D[subscript nd] groups
C[subscript i] group
C[subscript 3i] and S[subscript 4] groups
T group
T[subscript d] group
O group
O[subscript h] group
List of crystallographic point groups
Space groups
Directions and planes in crystals: Miller indices
Real crystal structures
Diamond structure
Zinc blende structure
Sodium chloride structure
Cesium chloride structure
Hexagonal close-packed structure
Wurtzite structure
Packing factor
Summary
Further reading
Problems
Electronic Structure of Atoms
Introduction
Spectroscopic emission lines and atomic structure of hydrogen
Atomic orbitals
Structures of atoms with many electrons
Bonds in solids
General principles
Ionic bonds
Covalent bonds
Mixed bonds
Metallic bonds
Secondary bonds
Introduction to energy bands
Summary
Further reading
Problems
Introduction to Quantum Mechanics
The quantum concepts
Blackbody radiation
The photoelectric effect
Wave-particle duality
The Davisson-Germer experiment
Elements of quantum mechanics
Basic formalism
General properties of wavefunctions and the Schrodinger equation
Simple quantum mechanical systems
Free particle
Particle in a 1-D box
Particle in a finite potential well
Reciprocal lattice
Summary
Further reading
Problems
Electrons and Energy Band Structures in Crystals
Introduction
Electrons in a crystal
Bloch theorem
One-dimensional Kronig-Penney model
Energy bands
Nearly-free electron approximation
Tight binding approximation
Heisenberg uncertainty principle
Dynamics of electrons in a crystal
Fermi energy
Electron distribution function
Electrons and holes
Band structures in real semiconductors
First Brillouin zone of an fcc lattice
First Brillouin zone of a bcc lattice
First Brillouin zones of a few semiconductors
Band structures in metals
Summary
References
Further reading
Problems
Low Dimensional Quantum Structures
Introduction
Density of states (3D)
Direct calculation
Other approach
Two-dimensional structures: quantum wells
Energy spectrum
Density of states
Effect of effective mass
One-dimensional structures: quantum wires
Zero-dimensional structures: quantum dots
Optical properties of 3D and 2D structures
Absorption coefficient
Excitonic effects
Examples of low dimensional structures
Quantum wires
Quantum dots
Summary
References
Further reading
Problems
Phonons
Introduction
Interaction of atoms in crystals: origin and formalism
One-dimensional monoatomic harmonic crystal
Traveling wave formalism
Boundary conditions
Phonon dispersion relation
Sound velocity
One-dimensional diatomic harmonic crystal
Formalism
Phonon dispersion relation
Extension to three-dimensional case
Phonons
Summary
Further reading
Problems
Thermal Properties of Crystals
Introduction
Phonon density of states (Debye model)
Debye model
Phonon density of states
Heat capacity
Lattice contribution to the heat capacity (Debye model)
Electronic contribution to the heat capacity
Thermal expansion
Thermal conductivity
Summary
References
Further reading
Problems
Equilibrium Charge Carrier Statistics in Semiconductors
Introduction
Density of states
Effective density of states (conduction band)
Effective density of states (valence band)
Mass action law
Doping: intrinsic vs. extrinsic semiconductor
Charge neutrality
Fermi energy as a function of temperature
Carrier concentration in a semiconductor
Summary
Further reading
Problems
Non-Equilibrium Electrical Properties of Semiconductors
Introduction
Electrical conductivity
Ohm's law in solids
Case of semiconductors
Hall effect
P-type semiconductor
N-type semiconductor
Compensated semiconductor
Charge carrier diffusion
Diffusion currents
Einstein relations
Diffusion lengths
Quasi-Fermi energy
Carrier generation and recombination mechanisms
Carrier generation
Direct band-to-band recombination
Schokley-Read-Hall recombination
Auger band-to-band recombination
Surface recombination
Summary
Further reading
Problems
Semiconductor Junctions
Introduction
Ideal p-n junction at equilibrium
Ideal p-n junction
Depletion approximation
Built-in electric field
Built-in potential
Depletion width
Energy band profile and Fermi energy
Non-equilibrium properties of p-n junctions
Forward bias: a qualitative description
Reverse bias: a qualitative description
A quantiative description
Ideal p-n junction diode equation
Minority and majority carrier currents in neutral regions
Deviations from the ideal p-n diode case
Avalanche breakdown
Zener breakdown
Metal-semiconductor junctions
Formalism
Schottky and ohmic contacts
Summary
Further reading
Problems
Compound Semiconductors and Crystal Growth Techniques
Introduction
III-V semiconductor alloys
III-V binary compounds
III-V ternary compounds
III-V quaternary compounds
Bulk single crystal growth techniques
Czochralski growth method
Bridgman growth method
Float-zone crystal growth method
Crystal wafer fabrication
Epitaxial growth techniques
Liquid phase epitaxy
Vapor phase epitaxy
Metalorganic chemical vapor deposition
Molecular beam epitaxy
Ex-situ characterization of epitaxial thin films
Summary
References
Further reading
Problems
Semiconductor Device Technology
Introduction
Oxidation
Oxidation process
Modeling of oxidation
Factors influencing oxidation rate
Oxide thickness characterization
Diffusion of dopants
Diffusion process
Constant-source diffusion: predeposition
Limited-source diffusion: drive-in
Junction formation
Ion implantation of dopants
Ion generation
Parameters of ion implantation
Ion range distribution
Characterization of diffused and implanted layers
Sheet resistivity
Junction depth
Summary
References
Further reading
Problems
Semiconductor Device Processing
Introduction
Photolithography
Mask fabrication
Positive and negative resists
Exposure and developing
Direct patterning and lift-off techniques
Electron-beam lithography
Electron-beam lithography system
Electron-beam lithography process
Parameters of electron-beam lithography
Multilayer resist systems
Examples of structures
Etching
Wet chemical etching
Plasma etching
Reactive ion etching
Sputter etching
Ion milling
Metallization
Metal interconnections
Vacuum evaporation
Sputtering deposition
Packaging of devices
Dicing
Wire bonding
Packaging
Summary
References
Further reading
Problems
Transistors
Introduction
Overview of amplification and switching
Bipolar junction transistors
Principles of operation for bipolar junction transistors
Amplification process using BJTs
Electrical charge distribution and transport in BJTs
Current transfer ratio
Heterojunction bipolar transistors
AlGaAs/GaAs HBT
GaInP/GaAs HBT
Field effect transistors
Gate control
Current-voltage characteristics
Summary
References
Problems
Semiconductor Lasers
Introduction
Types of lasers
General laser theory
Stimulated emission
Resonant cavity
Waveguides
Laser propagation and beam divergence
Waveguide design considerations
Ruby laser
Semiconductor lasers
Population inversion
Threshold condition and output power
Homojunction Laser
Heterojunction lasers
Device Fabrication
Separate confinement and quantum well lasers
Laser packaging
Distributed feedback lasers
Material choices for common interband lasers
Quantum cascade lasers
Type II lasers
Vertical cavity surface emitting lasers
Low dimensional lasers
Summary
References
Further reading
Problems
Photodetectors
Introduction
Electromagnetic radiation
Photodetector parameters
Responsivity
Noise in photodetectors
Noise mechanisms
Detectivity
Frequency response
Thermal detectors
Photon detectors
Photoconductive detectors
Photovoltaic detectors
Detectivity in photovoltaic detectors
Examples of photon detectors
P-i-n photodiodes
Avalanche photodiodes
Schottky barrier photodiodes
Metal-semiconductor-metal photodiodes
Type II superlattice photodetectors
Quantum well intersubband photodetectors
Photoelectromagnetic detectors
Summary
References
Further reading
Problems
Appendix
Index