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Thin Film Materials Stress, Defect Formation and Surface Evolution

ISBN-10: 0521529778
ISBN-13: 9780521529778
Edition: 2009
List price: $82.00 Buy it from $54.37
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Description: Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress,  More...

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Book details

List price: $82.00
Copyright year: 2009
Publisher: Cambridge University Press
Publication date: 12/11/2008
Binding: Paperback
Pages: 770
Size: 7.00" wide x 9.75" long x 1.50" tall
Weight: 3.278
Language: English

Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation and surface evolution in thin films. Physical phenomena are examined from the continuum down to the sub-microscopic length scales, with the connections between the structure of the material and its behavior described wherever appropriate. While the book develops a comprehensive scientific basis with which stress, deformation and failure in thin film materials can be characterized, an attempt is also made to link the scientific concepts to a broad range of practical applications through example problems, historical notes, case studies and exercises. Of particular interest to engineers, materials scientists and physicists, this book will be essential reading on senior undergraduate and graduate courses on thin films.

Introduction and overview
Film stress and substrate curvature
Stress in anisotropic and patterned films
Delamination and fracture
Film buckling, bulging and peeling
Dislocation formation in epitaxial systems
Dislocation interactions and strain relaxation
Equilibrium and stability of surfaces
The role of stress in mass transport

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