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| Preface | |
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| Theoretical Aspects | |
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| Description of an Electromagnetic Wave | |
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| Interaction of Light with material | |
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| Polarized Light | |
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| Reflections | |
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| Ellipsometry Definitions | |
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| References | |
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| Instrumentation | |
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| Fundamentals and History | |
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| Optical Elements | |
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| The Manual Null Instrument | |
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| Rotating Element Instruments | |
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| References | |
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| Using Optical Parameters to Determine Material Properties | |
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| Del/Psi and n and k for Substrates | |
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| The Calculation of Del/Psi Trajectories for Films on Substrates | |
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| Trajectories for Transparent Films | |
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| Trajectories for Absorbing Films | |
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| Two-Film Structures | |
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| References | |
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| Determining Optical Parameters for Inaccessible Substrates and Unknown Films | |
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| Inaccessible Substrates and Unknown Films | |
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| Determining Film-Free Values of Del and Psi | |
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| Determining the Complex Index of Refraction of the Film | |
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| Summary | |
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| References | |
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| Extremely Thin Films | |
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| General Principles | |
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| Some Examples of Extremely Thin Films | |
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| Summary | |
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| References | |
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| The Special Case of Polysilicon | |
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| General | |
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| Range of the Optical Constants | |
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| Del/Psi Trajectories in General | |
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| Effect of the Coefficient of Extinction | |
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| Effect of the Index of Refraction | |
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| Requirements | |
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| Measuring the Thickness of Oxide on Polysilicon | |
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| Simplifications | |
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| References | |
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| The Effect of Roughness | |
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| General | |
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| Macroscopic Roughness | |
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| Microscopic Roughness | |
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| Perspective | |
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| Substrate Roughness | |
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| Film Growth with Roughness | |
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| References | |
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| Case Studies | |
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| Dissolution and Swelling of Thin Polymer Films | |
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| General | |
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| Early Work Using a Psi-Meter | |
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| Later Work Using an Ellipsometer | |
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| Modeling the Swollen Film | |
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| Comparison of Data with Model | |
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| References | |
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| Ion Beam Interaction with Silicon | |
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| General | |
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| Development of the Analysis Method | |
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| Ion Beam Damage Results | |
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| Damage Removal | |
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| References | |
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| Dry Oxidation of Metals | |
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| General | |
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| Oxidation of Bismuth at Room Temperature | |
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| Plasma Oxidation of Tantalum | |
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| Thermal Oxidation of Nickel | |
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| References | |
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| Optical Properties of Sputtered Chromium Suboxide Thin Films | |
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| General | |
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| Film Preparation and Auger Analysis | |
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| Optical Measurements | |
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| Reference | |
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| Ion-Assisted Film Growth of Zirconium Dioxide | |
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| Experimental Apparatus | |
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| Optical Measurements | |
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| References | |
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| Electrochemical/Ellipsometric Studies of Oxides on Metals | |
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| General | |
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| Experimental Methods | |
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| Oxide Growth: 1. Zirconium | |
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| Oxide Growth: 2. Titanium | |
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| Oxide Growth: 3. Vanadium | |
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| Deposition of Oxides: 1. Lead | |
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| Deposition of Oxides: 2. Manganese | |
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| References | |
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| Amorphous Hydrogenated Carbon Films | |
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| General | |
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| Mechanism of Film Formation | |
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| Properties vs. Deposition Parameters | |
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| References | |
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| Fluoropolymer Films on Silicon from Reactive Ion Etching | |
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| General | |
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| Film Formation and Properties | |
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| Interface Studies | |
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| Removal with a Hydrogen Plasma | |
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| Other Formation and Removal Studies | |
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| References | |
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| Various Films on InP | |
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| General | |
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| The InP Surface Optical Properties | |
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| The Thermal Oxide on InP | |
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| PMMA on InP | |
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| References | |
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| Benzotriazole and Benzimidazole on Copper | |
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| General | |
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| Ex situ Studies | |
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| In situ Studies | |
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| References | |
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| Gas Adsorption on Metal Surfaces | |
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| General | |
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| NO, O[subscript 2], and CO on Copper | |
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| Oxidation of Nickel | |
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| The Interaction of Small Amounts of Oxygen with Aluminum Films | |
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| Residual Gases on Silver | |
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| References | |
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| Silicon-Germanium Thin Films | |
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| General | |
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| Experimental | |
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| Results | |
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| References | |
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| Profiling of HgCdTe | |
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| General | |
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| Experimental | |
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| Results | |
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| Discussion | |
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| References | |
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| Oxides and Nitrides of Silicon | |
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| General | |
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| Low Temperature Growth of Silicon Dioxide | |
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| Plasma Enhanced Silicon Nitride | |
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| Silicon Oxynitride Films as a Selective Diffusion Barrier | |
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| References | |
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| Appendices | |
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| Del/Psi Trajectory Calculations | |
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| General | |
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| Program OneFilm | |
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| Program ThreeFilms | |
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| References | |
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| Effective Medium Considerations | |
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| General | |
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| Theory | |
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| Examples | |
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| References | |
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| Literature Values of Optical Constants of Various Materials | |
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| General | |
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| Values | |
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| References | |
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| Index | |