Ion Implantation in Microelectronics A Comprehensive Bibliography

Name: Ion Implantation in Microelectronics A Comprehensive Bibliography
Price: 60.47 USD
Availability: InStock
ISBN: 9780306651984

ISBN-10: 030665198X

ISBN-13: 9780306651984

Edition: 1981

Authors: A. H. Agajanian

List price: $99.00

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Description:

During the past ten years the use of ion implantation for doping semiconductors has become an active area of research and new device development. This doping technique has recently reached a level of maturity such that it is an integral step in the manu facturing of discrete semiconductor devices and integrated circuits. Ion implantation has significant advantages over diffusion such as: precision, purity, versatility, and automation; all of which are important for VLSI purposes. Ion implantation has also found new applications in magnetic bubble domain materials, superconductors, and materials synthesis. This book is a comprehensive bibliography of 2467 references of the world's…

Book details

List price: $99.00
Copyright year: 1981
Publisher: Springer
Publication date: 9/30/1981
Binding: Hardcover
Pages: 266
Language: English