Fabrication Engineering at the Micro and Nanoscale

Name: Fabrication Engineering at the Micro and Nanoscale
Price: 39.3 USD
Availability: InStock
ISBN: 9780195320176

ISBN-10: 0195320174

ISBN-13: 9780195320176

Edition: 3rd 2007

Authors: Stephen A. Campbell

List price: $97.95

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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial…

Book details

List price: $97.95
Edition: 3rd
Copyright year: 2007
Publisher: Oxford University Press, Incorporated
Publication date: 9/17/2007
Binding: Paperback
Pages: 704
Size: 9.02" wide x 7.52" long x 0.91" tall
Weight: 2.244
Language: English




An Introduction to Microelectronic Fabrication



Semiconductor Substrates



Diffusion



Thermal Oxidation



Ion Implantation



Rapid Thermal Processing



Optical Lithography



Photoresists



Nonoptical Lithographic Techniques



Vacuum Science and Plasmas



Etching



Physical Deposition: Evaporation and Sputtering



Chemical Vapor Deposition



Epitaxial Growth



Device Isolation, Contacts, and Metallization



CMOS Technologies



Other Transistor Technologies



Optoelectronic Technologies



Mems



Integrated Circuit Manufacturing


Appendixes


Acronyms and Common Symbols


Properties of Selected Semiconductor Materials


Physical Constants


Conversion Factors


Some properties of the Error Function


F Values


Index