Fabrication Engineering at the Micro- and Nanoscale

ISBN-10: 0195320174
ISBN-13: 9780195320176
Edition: 3rd 2007
List price: $97.95
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Description: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields  More...

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Book details

List price: $97.95
Edition: 3rd
Copyright year: 2007
Publisher: Oxford University Press, Incorporated
Publication date: 9/17/2007
Binding: Paperback
Pages: 704
Size: 7.50" wide x 9.25" long x 1.00" tall
Weight: 2.486
Language: English

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite--the Silvaco AthenaRG set of codes--to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition. The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.

An Introduction to Microelectronic Fabrication
Semiconductor Substrates
Diffusion
Thermal Oxidation
Ion Implantation
Rapid Thermal Processing
Optical Lithography
Photoresists
Nonoptical Lithographic Techniques
Vacuum Science and Plasmas
Etching
Physical Deposition: Evaporation and Sputtering
Chemical Vapor Deposition
Epitaxial Growth
Device Isolation, Contacts, and Metallization
CMOS Technologies
Other Transistor Technologies
Optoelectronic Technologies
Mems
Integrated Circuit Manufacturing
Appendixes
Acronyms and Common Symbols
Properties of Selected Semiconductor Materials
Physical Constants
Conversion Factors
Some properties of the Error Function
F Values
Index

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