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| Introduction | |
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| The History of MEMS Development | |
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| The Intrinsic Characteristics of MEMS | |
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| Devices: Sensors and Actuators | |
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| Introduction to Microfabrication | |
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| Overview of Microfabrication | |
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| The Microelectronics Fabrication Process | |
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| Silicon-based MEMS Process | |
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| New Materials and Fabrication Processes | |
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| Points of Consideration for Processing | |
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| Review of Essential Electrical and Mechanical Concepts | |
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| Conductivity of Semiconductors | |
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| Crystal Planes and Orientations | |
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| Stress and Strain | |
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| Flexural Beam Bending Analysis Under Simple Loading Conditions | |
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| Torsional Deflections | |
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| Intrinsic Stress | |
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| Resonant Frequency and Quality Factor | |
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| Active Tuning of Spring Constant and Resonant Frequency | |
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| A List of Suggested Courses and Books | |
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| Electrostatic Sensing and Actuation | |
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| Introduction to Electrostatic Sensors and Actuators | |
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| Parallel-Plate Capacitors | |
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| Applications of Parallel-Plate Capacitors | |
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| Interdigitated Finger Capacitors | |
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| Applications of Comb-Drive Devices | |
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| Thermal Sensing and Actuation | |
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| Introduction | |
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| Sensors and Actuators Based on Thermal Expansion | |
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| Thermal Couplesnbsp | |
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| Thermal Resistors | |
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| Applications | |
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| Piezoresistive Sensors | |
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| Origin and Expression of Piezoresistivity | |
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| Piezoresistive Sensor Materials | |
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| Stress Analysis of Mechanical Elements | |
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| Applications of Piezoresistive Sensors | |
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| Piezoelectric Sensing and Actuation | |
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| Introduction | |
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| Properties of Piezoelectric Materials | |
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| Applications | |
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| Magnetic Actuation | |
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| Essential Concepts and Principles | |
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| Fabrication of Micromagnetic Components | |
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| Case Studies of MEMS Magnetic Actuators | |
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| Summary of Sensing and Actuation | |
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| Comparison of Major Sensing and Actuation Methods | |
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| Tunneling Sensing | |
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| Optical Sensing | |
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| Field Effect Transistors | |
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| Radio Frequency Resonance Sensing | |
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| Bulk Micromachining and Silicon Anisotropic Etching | |
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| Introduction | |
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| Anisotropic Wet Etching | |
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| Dry Etching of Silicon - Plasma Etching | |
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| Deep Reactive Ion Etching (DRIE) | |
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| Isotropic Wet Etching | |
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| Gas-Phase Etchants | |
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| Native Oxide | |
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| Wafer bonding | |
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| Case Studies | |
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| Surface Micromachining | |
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| Basic Surface Micromachining Processes | |
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| Structural and Sacrificial Materials | |
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| Acceleration of Sacrificial Etch | |
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| Stiction and AntiStiction Methods | |
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| Assembly of 3D MEMS | |
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| Foundry Process | |
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| Polymer MEMS | |
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| Previ | |