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Device Physics | |
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Semiconductors | |
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Generation and Recombination | |
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Extrinsic Semiconductors | |
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Diffusion and Drift | |
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PN Junctions | |
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Depletion Regions | |
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PH Diodes | |
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Schottky Diodes | |
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Zener Diodes | |
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Ohmic Contacts | |
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Bipolar Junction Transistors | |
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Beta | |
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I-V Characteristics | |
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MOS Transistors | |
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Threshold Voltage | |
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I-V Characteristics | |
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JFET Transistors | |
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Semiconductor Fabrication | |
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Silicon Manufacture | |
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Crystal Growth | |
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Wafer Manufacturing | |
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The Crystal Structure of Silicon | |
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Photolithography | |
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Photoresists | |
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Photomasks and Reticles | |
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Patterning | |
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Oxide Growth and Removal | |
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Oxide Growth and Deposition | |
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Oxide Removal | |
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Other Effects of Oxide Growth and Removal | |
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Local Oxidation of Silicon (LOCOS) | |
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Diffusion and Ion Implantation | |
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Diffusion | |
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Other Effects of Diffusion | |
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Ion Implantation | |
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Silicon Deposition | |
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Epitaxy | |
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Polysilicon Deposition | |
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Metallization | |
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Deposition and Removal of Aluminum | |
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Refractory Barrier Metal | |
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Silicidation | |
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Interlevel Oxide, Interlevel Nitride, and Protective Overcoat | |
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Assembly | |
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Mount and Bond | |
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Packaging | |
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Representative Processes | |
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Standard Bipolar | |
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Essential Features | |
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Fabrication Sequence | |
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Available Devices | |
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Process Extensions | |
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Polysilicon-Gate CMOS | |
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Essential Features | |
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Fabrication Sequence | |
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Available Devices | |
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Process Extensions | |
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Analog BiCMOS | |
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Essential Features | |
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Fabrication Sequence | |
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Available Devices | |
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Process Extensions | |
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Failure Mechanisms | |
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Electrical Overstress | |
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Electrostatic Discharge (ESD) | |
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Electromigration | |
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The Antenna Effect | |
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Contamination | |
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Dry Corrosion | |
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Mobile Ion Contamination | |
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Surface Effects | |
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Hot Carrier Injection | |
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Parasitic Channels and Charge Spreading | |
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Parasitics | |
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Substrate Debiasing | |
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Minority-Carrier Injection | |
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Resistors | |
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Resistivity and Sheet Resistance | |
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Resistor Layout | |
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Resistor Variability | |
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Process Variation | |
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Temperature Variation | |
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Nonlinearity | |
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Contact Resistance | |
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Resistor Parasitics | |
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Comparison of Available Resistors | |
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Base Resistors | |
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Emitter Resistors | |
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Base Pinch Resistors | |
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High-Sheet Resistors | |
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Epi Pinch Resistors | |
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Metal Resistors | |
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Poly Resistors | |
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NSD and PSD Resistors | |
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N-Well Resistors | |
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Thin-Film Resistors | |
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Adjusting Resistor Values | |
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Tweaking Resistors | |
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Trimming Resistors | |
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Capacitors | |
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Capacitance | |
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Capacitor Variability | |
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Process Variation | |
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Voltage Modulation and Temperature Variation | |
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Capacitor Parasitics | |
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Comparison of Available Capacitors | |
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Base-Emitter Junction Capacitors | |
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MOS Capacitors | |
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Poly-Poly Capacitors | |
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Miscellaneous Styles of Capacitors | |
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Matching of Resistors and Capacitors | |
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Measuring Mismatch | |
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Causes of Mismatch | |
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Random Statistical Fluctuations | |
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Process Biases | |
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Pattern Shift | |
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Variations in Polysilicon Etch Rate | |
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Diffusion Interactions | |
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Stress Gradients and Package Shifts | |
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Temperature Gradients and Thermoelectrics | |
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Electrostatic Interactions | |
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Rules for Device Matching | |
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Rules for Resistor Matching | |
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Rules for Capacitor Matching | |
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Bipolar Transistors | |
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Topics in Bipolar Transistor Operation | |
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Beta Rolloff | |
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Avalanche Breakdown | |
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Thermal Runaway and Secondary Breakdown | |
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Saturation in NPN Transistors | |
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Saturation in Lateral PNP Transistors | |
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Parasitics of Bipolar Transistors | |
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Standard Bipolar Small-Signal | |