User's Guide to Ellipsometry

Name: User's Guide to Ellipsometry
Price: 11.99 USD
Availability: InStock
ISBN: 9780126939507

ISBN-10: 0126939500

ISBN-13: 9780126939507

Edition: 1993

Authors: Harland G. Tompkins

List price: $72.95

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Description:

Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.

Book details

List price: $72.95
Copyright year: 1993
Publisher: Elsevier Science & Technology Books
Publication date: 1/11/1993
Binding: Hardcover
Pages: 260
Size: 6.00" wide x 9.00" long x 0.70" tall
Weight: 1.232
Language: English



Preface


Theoretical Aspects


Instrumentation


Using Optical Parameters to Determine Material Properties


Determining Optical Parameters for Inaccessible Substrates and Unknown Films


Extremely Thin Films


The Special Case of Polysilicon


The Effect of Roughness


Case Studies


Dissolution and Swelling of Thin Polymer Films


Ion Beam Interaction with Silicon


Dry Oxidation of Metals


Optical Properties of Sputtered Chromium Suboxide Thin Films


Ion-Assisted Film Growth of Zirconium Dioxide


Electrochemical/Ellipsometric Studies of Oxides on Metals


Amorphous Hydrogenated Carbon Films


Fluoropolymer Films on Silicon from Reactive Ion Etching


Various Films on InP


Benzotriazole and Benzimidazole on Copper


Gas Adsorption on Metal Surfaces


Silicon-Germanium Thin Films


Profiling of HgCdTe


Oxides and Nitrides of Silicon


Appendices


Appendix A: Del/Psi Trajectory Calculations


Appendix B: Effective Medium Considerations


Appendix C: Literature Values of Optical Constants of Various Materials


Index