Materials Science of Thin Films Depositon and Structure

Name: Materials Science of Thin Films Depositon and Structure
Price: 67.93 USD
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ISBN: 9780125249751

ISBN-10: 0125249756

ISBN-13: 9780125249751

Edition: 2nd 2002 (Revised)

Authors: Milton Ohring

List price: $146.00

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Description:

Updated with developments since 1992, this new edition includes comprehensive coverage of all the latest advances and provides exercises at the end of each chapter.

Book details

List price: $146.00
Edition: 2nd
Copyright year: 2002
Publisher: Elsevier Science & Technology
Publication date: 10/20/2001
Binding: Hardcover
Pages: 794
Size: 5.94" wide x 9.00" long x 1.25" tall
Weight: 3.058
Language: English

Dr. Milton Ohring, author of two previously acclaimed Academic Press books,The Materials Science of Thin Films (l992) and Engineering Materials Science (1995), has taught courses on reliability and failure in electronics at Bell Laboratories (AT&T and Lucent Technologies). From this perspective and the well-written tutorial style of the book, the reader will gain a deeper physical understanding of failure mechanisms in electronic materials and devices; acquire skills in the mathematical handling of reliability data; and better appreciate future technology trends and the reliability issues they raise.



Foreword to First Edition


Preface


Acknowledgments


A Historical Perspective



A Review of Materials Science



Introduction



Structure



Defects in Solids



Bonds and Bands in Materials



Thermodynamics of Materials



Kinetics



Nucleation



An Introduction to Mechanical Behavior



Conclusion


Exercises


References



Vacuum Science and Technology



Introduction



Kinetic Theory of Gases



Gas Transport and Pumping



Vacuum Pumps



Vacuum Systems



Conclusion


Exercises


References



Thin-Film Evaporation Processes



Introduction



The Physics and Chemistry of Evaporation



Film Thickness Uniformity and Purity



Evaporation Hardware



Evaporation Processes and Applications



Conclusion


Exercises


References



Discharges, Plasmas, and Ion-Surface Interactions



Introduction



Plasmas, Discharges, and Arcs



Fundamentals of Plasma Physics



Reactions in Plasmas



Physics of Sputtering



Ion Bombardment Modification of Growing Films



Conclusion


Exercises


References



Plasma and Ion Beam Processing of Thin Films



Introduction



DC, AC, and Reactive Sputtering Processes



Magnetron Sputtering



Plasma Etching



Hybrid and Modified PVD Processes



Conclusion


Exercises


References



Chemical Vapor Deposition



Introduction



Reaction Types



Thermodynamics of CVD



Gas Transport



Film Growth Kinetics



Thermal CVD Processes



Plasma-Enhanced CVD Processes



Some CVD Materials Issues



Safety



Conclusion


Exercises


References



Substrate Surfaces and Thin-Film Nucleation



Introduction



An Atomic View of Substrate Surfaces



Thermodynamic Aspects of Nucleation



Kinetic Processes in Nucleation and Growth



Experimental Studies of Nucleation and Growth



Conclusion


Exercises


References



Epitaxy



Introduction



Manifestations of Epitaxy



Lattice Misfit and Defects in Epitaxial Films



Epitaxy of Compound Semiconductors



High-Temperature Methods for Depositing Epitaxial Semiconductor Films



Low-Temperature Methods for Depositing Epitaxial Semiconductor Films



Mechanisms and Characterization of Epitaxial Film Growth



Conclusion


Exercises


References



Film Structure



Introduction



Structural Morphology of Deposited Films and Coatings



Computational Simulations of Film Structure



Grain Growth, Texture, and Microstructure Control in Thin Films



Constrained Film Structures



Amorphous Thin Films



Conclusion


Exercises


References



Characterization of Thin Films and Surfaces



Introduction



Film Thickness



Structural Characterization of Films and Surfaces



Chemical Characterization of Surfaces and Films



Conclusion


Exercises


References



Interdiffusion, Reactions, and Transformations in Thin Films



Introduction



Fundamentals of Diffusion



Interdiffusion in Thin Metal Films



Compound Formation and Phase Transformations in Thin Films



Metal-Semiconductor Reactions



Mass Transport in Thin Films under Large Driving Forces



Conclusion


Exercises


References



Mechanical Properties of Thin Films



Introduction



Mechanical Testing and Strength of Thin Films



Analysis of Internal Stress



Techniques for Measuring Internal Stress in Films



Internal Stresses in Thin Films and Their Causes



Mechanical Relaxation Effects in Stressed Films



Adhesion



Conclusion


Exercises


References


Index