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Practical MEMS Analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and microfluidic Systems

Practical MEMS Analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and microfluidic Systems
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9780982299104
U.S. Edition
Kaajakari, Ville
Small Gear Publishing
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