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Microsystems Mechanical Design

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ISBN-10: 3211374531

ISBN-13: 9783211374535

Edition: 2006

Authors: Francesco De Bona, Eniko T. Enikov

List price: $139.99
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Description:

This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies were also discussed and light was shed on the potential applications of microsystems to nano-scale manipulation of matter, thus introducing the topic of nano-scale engineering mechanics. The proposed approach is new in the sense that, with respect to the main publications on this topic, the authors are all mechanical engineers and therefore the aspect related to the mechanics of microsystems is developed deeply in details. Special issues concern an original approach to the…    
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Book details

List price: $139.99
Copyright year: 2006
Publisher: Springer
Publication date: 9/1/2006
Binding: Paperback
Pages: 211
Size: 6.69" wide x 9.45" long x 0.50" tall
Weight: 1.738
Language: English

Francesco De Bona, University of Udine, Italy. Eniko T. Enikov, University of Arizona, USA.

Introduction to micro-systems and to the techniques for their fabrication
Microstructures under electrostatic loads : discrete system modelling
Dynamics of mechatronic systems at microscale
Continuum microstructures loaded electrostatically
Design of electro-thermal micro-positioners : mechanics and electronic position detection
Design of compliant micromechanisms
Micro- and nano-assemby and manipulation techniques for MEMS
Microfluidics : device science and technology