Biomedical Microsystems

ISBN-10: 1420051229

ISBN-13: 9781420051223

Edition: 2011

Authors: Ellis Meng

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Book details

List price: $104.95
Copyright year: 2011
Publisher: CRC Press LLC
Publication date: 9/29/2010
Binding: Hardcover
Pages: 408
Size: 6.50" wide x 9.75" long x 1.00" tall
Weight: 1.540
Language: English

Preface
Acknowledgments
Author
Introduction
Evolution of MEMS
Applications of MEMS
BioMEMS Applications
MEMS Resources
Text Goals and Organization
Miniaturization and Scaling
Geometrical Scaling
Scaling in Nature
Scaling of Forces
Notation
Implications
Scaling of Phenomena
Electricity
Mechanical Systems
Fluidic Systems
Heat Transfer
Problems
References
BioMEMS Materials
Traditional MEMS and Microelectronic Materials
Classification of Electronic Materials
Silicon
Crystal Structure
Single Crystal Silicon Fabrication
Properties of Silicon
Properties of Thin Films
Adhesion
Stress
Resistivity
Silicon Compounds
Polycrystalline Silicon
Silicon Dioxide
Silicon Nitride
Piezoelectric Crystals
Metals
Polymeric Materials for MEMS
Polydimethylsiloxane (Silicone Rubber)
Polyimide
SU-8
Parylene
Conductive Polymers
Biomaterials
Material Selection for Biological and Medical Applications
Food and Drug Administration and Medical Device Regulation
Biocompatibility
Sterilization
Problems
References
Microfabrication Methods and Processes for BioMEMS
Introduction
Microlithography
Photolithography Process
Surface Preparation
Spin Coating
Soft Baking
Exposure
Development
Descum
Hard Baking and Post Baking
Photoresists
Photolithography Tools and Resolution
Contact and Proximity Printings
Projection
Resolution
Double-Sided Lithography
Multilayer Resists
Other Lithography Methods
Photomasks
Mask Layout
Producing a Photomask
Mask Alignment
Cleanroom Processing
Doping
Diffusion
Ion Implantation
Micromachining
Subtractive Processes
Wet Etching
Dry Etching
Additive Processes
Oxidation
Chemical Vapor Deposition
Physical Vapor Deposition
Epitaxy
Electrochemical Deposition
Bulk and Surface Micromachining
Bulk Micromachining
Surface Micromachining
LIGA
Micromolding and Imprint Lithography
Casting and Soft Lithography
Injection Molding
Compression Molding
Other Micromachining Techniques
Microstereolithography
Probe-Based Lithographic Techniques
Chemical Mechanical Polishing
Wafer Bonding, Assembly, and Packaging
Dicing
Wafer Bonding Methods
Fusion Bonding
Anodic Bonding
Low-Temperature Glass Bonding
Eutectic Bonding
Adhesive Bonding
Hermeticity and Sealing
Assembly
Electrical Packaging
Microfluidic Packaging
Medical Packaging Requirements
Surface Treatment
Stiction
Surface Modification
Conversion Factors for Energy and Intensity Units
Problems
Laboratory Exercises
References
Microfluidics
Introduction and Fluid Properties
Fluids
Fluid as a Continuum
Properties of a Fluid
Pressure
Density
Temperature
Viscosity
Thermal Conductivity
Surface Tension
Contact Angle
Concepts in Microfluidics
Capillarity
Fluid Flow
Couette Flow
Poiseuille Flow
Hydraulic Resistance
Hydrodynamic Capacitance
Hydrodynamic Inductance
Fluidic Circuit Theory
Stokes Drag
Fluid-Transport Phenomena and Pumping
Diffusion
Electrowetting
Electrokinetics
Electric Double Layers
Electroosmosis
Electrophoresis
Dielectrophoresis
Magnetophoresis
Flow Control
Microchannels
Laminar Flow in Microchannels
Valving
Passive Valves
Actuation Methods and Active Valves
Pumping
Passive Pumps
Active Pumps: Mechanical
Active Pumps: Nonmechanical
Mixing
Problems
Laboratory Exercise
References
Lab-on-a-Chip or Micro Total Analysis Systems
Microanalytical Systems in Chemistry and Biology
Sample Pretreatment
Filtration
Filtration Structures
Filtration Membranes
Dialysis
Extraction
Liquid-Phase Extraction
Solid-Phase Extraction
Sample Introduction
Electrokinetic Injection
Hydrodynamic Injection
Separations
Separation Performance
Chromatography
High-Performance Liquid Chromatography
Hydrodynamic Chromatography
Affinity Chromatography
Field Flow Fractionation
Electrophoresis
Capillary Electrophoresis and Capillary Gel Electrophoresis
Isoelectric Focusing
Problems
References
Sensing and Detection Methods
Sensing and Detection
Sensor Characteristics
Principles of Physical Sensing
Resistive Sensors
Capacitive Sensors
Inductive Sensors
Resonant Sensors
Sensor Examples: Pressure Sensing
Biological and Chemical Detection Methods
Biological Sensors
Electrochemical Methods
Amperometry
Voltammetry
Potentiometry
Conductometry
Optical Detection Methods
Fluorescence
Absorbance
Chemiluminescence
Other Optical Detection Methods
Mass Spectrometry
Electrospray Ionization
Matrix-Assisted Laser Desorption Ionization
Problems
References
Applications to Cells, Nucleic Acids, and Proteins
Cells
Cell Culture Reactors
Cell Adhesion
Retention: Filters, Weirs, and Polymer Matrix
Cell Manipulation
Electroporation
Cell Lysis
Cell-Based Sensors
Nucleic Acids
Purification
Amplification: Polymerase Chain Reaction
Hybridization: Microchannel and Microarray
Sequencing
Integrated Genetic Analysis Systems
Proteins
Immunoassays
Enzymatic Assays
Problems
References
Clinical Monitoring
Flow Cytometry
Microdialysis
Catheter-Based Sensors
Endoscopy
Point of Care
Problems
References
MEMS Implants and Bioelectric Interfaces
Implantable MEMS
Microelectrodes and Neural Probes
Implantable Sensors
Drug Delivery
Tissue Engineering
Problems
References
Index
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