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| Preface | |
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| Acknowledgments | |
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| Author | |
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| Introduction | |
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| Evolution of MEMS | |
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| Applications of MEMS | |
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| BioMEMS Applications | |
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| MEMS Resources | |
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| Text Goals and Organization | |
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| Miniaturization and Scaling | |
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| Geometrical Scaling | |
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| Scaling in Nature | |
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| Scaling of Forces | |
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| Notation | |
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| Implications | |
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| Scaling of Phenomena | |
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| Electricity | |
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| Mechanical Systems | |
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| Fluidic Systems | |
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| Heat Transfer | |
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| Problems | |
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| References | |
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| BioMEMS Materials | |
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| Traditional MEMS and Microelectronic Materials | |
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| Classification of Electronic Materials | |
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| Silicon | |
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| Crystal Structure | |
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| Single Crystal Silicon Fabrication | |
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| Properties of Silicon | |
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| Properties of Thin Films | |
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| Adhesion | |
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| Stress | |
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| Resistivity | |
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| Silicon Compounds | |
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| Polycrystalline Silicon | |
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| Silicon Dioxide | |
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| Silicon Nitride | |
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| Piezoelectric Crystals | |
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| Metals | |
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| Polymeric Materials for MEMS | |
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| Polydimethylsiloxane (Silicone Rubber) | |
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| Polyimide | |
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| SU-8 | |
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| Parylene | |
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| Conductive Polymers | |
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| Biomaterials | |
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| Material Selection for Biological and Medical Applications | |
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| Food and Drug Administration and Medical Device Regulation | |
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| Biocompatibility | |
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| Sterilization | |
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| Problems | |
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| References | |
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| Microfabrication Methods and Processes for BioMEMS | |
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| Introduction | |
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| Microlithography | |
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| Photolithography Process | |
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| Surface Preparation | |
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| Spin Coating | |
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| Soft Baking | |
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| Exposure | |
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| Development | |
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| Descum | |
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| Hard Baking and Post Baking | |
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| Photoresists | |
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| Photolithography Tools and Resolution | |
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| Contact and Proximity Printings | |
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| Projection | |
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| Resolution | |
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| Double-Sided Lithography | |
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| Multilayer Resists | |
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| Other Lithography Methods | |
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| Photomasks | |
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| Mask Layout | |
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| Producing a Photomask | |
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| Mask Alignment | |
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| Cleanroom Processing | |
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| Doping | |
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| Diffusion | |
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| Ion Implantation | |
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| Micromachining | |
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| Subtractive Processes | |
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| Wet Etching | |
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| Dry Etching | |
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| Additive Processes | |
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| Oxidation | |
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| Chemical Vapor Deposition | |
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| Physical Vapor Deposition | |
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| Epitaxy | |
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| Electrochemical Deposition | |
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| Bulk and Surface Micromachining | |
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| Bulk Micromachining | |
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| Surface Micromachining | |
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| LIGA | |
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| Micromolding and Imprint Lithography | |
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| Casting and Soft Lithography | |
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| Injection Molding | |
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| Compression Molding | |
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| Other Micromachining Techniques | |
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| Microstereolithography | |
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| Probe-Based Lithographic Techniques | |
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| Chemical Mechanical Polishing | |
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| Wafer Bonding, Assembly, and Packaging | |
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| Dicing | |
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| Wafer Bonding Methods | |
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| Fusion Bonding | |
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| Anodic Bonding | |
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| Low-Temperature Glass Bonding | |
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| Eutectic Bonding | |
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| Adhesive Bonding | |
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| Hermeticity and Sealing | |
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| Assembly | |
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| Electrical Packaging | |
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| Microfluidic Packaging | |
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| Medical Packaging Requirements | |
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| Surface Treatment | |
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| Stiction | |
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| Surface Modification | |
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| Conversion Factors for Energy and Intensity Units | |
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| Problems | |
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| Laboratory Exercises | |
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| References | |
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| Microfluidics | |
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| Introduction and Fluid Properties | |
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| Fluids | |
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| Fluid as a Continuum | |
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| Properties of a Fluid | |
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| Pressure | |
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| Density | |
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| Temperature | |
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| Viscosity | |
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| Thermal Conductivity | |
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| Surface Tension | |
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| Contact Angle | |
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| Concepts in Microfluidics | |
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| Capillarity | |
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| Fluid Flow | |
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| Couette Flow | |
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| Poiseuille Flow | |
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| Hydraulic Resistance | |
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| Hydrodynamic Capacitance | |
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| Hydrodynamic Inductance | |
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| Fluidic Circuit Theory | |
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| Stokes Drag | |
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| Fluid-Transport Phenomena and Pumping | |
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| Diffusion | |
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| Electrowetting | |
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| Electrokinetics | |
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| Electric Double Layers | |
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| Electroosmosis | |
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| Electrophoresis | |
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| Dielectrophoresis | |
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| Magnetophoresis | |
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| Flow Control | |
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| Microchannels | |
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| Laminar Flow in Microchannels | |
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| Valving | |
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| Passive Valves | |
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| Actuation Methods and Active Valves | |
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| Pumping | |
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| Passive Pumps | |
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| Active Pumps: Mechanical | |
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| Active Pumps: Nonmechanical | |
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| Mixing | |
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| Problems | |
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| Laboratory Exercise | |
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| References | |
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| Lab-on-a-Chip or Micro Total Analysis Systems | |
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| Microanalytical Systems in Chemistry and Biology | |
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| Sample Pretreatment | |
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| Filtration | |
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| Filtration Structures | |
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| Filtration Membranes | |
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| Dialysis | |
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| Extraction | |
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| Liquid-Phase Extraction | |
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| Solid-Phase Extraction | |
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| Sample Introduction | |
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| Electrokinetic Injection | |
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| Hydrodynamic Injection | |
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| Separations | |
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| Separation Performance | |
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| Chromatography | |
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| High-Performance Liquid Chromatography | |
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| Hydrodynamic Chromatography | |
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| Affinity Chromatography | |
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| Field Flow Fractionation | |
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| Electrophoresis | |
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| Capillary Electrophoresis and Capillary Gel Electrophoresis | |
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| Isoelectric Focusing | |
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| Problems | |
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| References | |
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| Sensing and Detection Methods | |
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| Sensing and Detection | |
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| Sensor Characteristics | |
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| Principles of Physical Sensing | |
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| Resistive Sensors | |
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| Capacitive Sensors | |
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| Inductive Sensors | |
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| Resonant Sensors | |
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| Sensor Examples: Pressure Sensing | |
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| Biological and Chemical Detection Methods | |
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| Biological Sensors | |
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| Electrochemical Methods | |
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| Amperometry | |
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| Voltammetry | |
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| Potentiometry | |
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| Conductometry | |
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| Optical Detection Methods | |
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| Fluorescence | |
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| Absorbance | |
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| Chemiluminescence | |
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| Other Optical Detection Methods | |
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| Mass Spectrometry | |
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| Electrospray Ionization | |
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| Matrix-Assisted Laser Desorption Ionization | |
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| Problems | |
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| References | |
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| Applications to Cells, Nucleic Acids, and Proteins | |
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| Cells | |
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| Cell Culture Reactors | |
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| Cell Adhesion | |
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| Retention: Filters, Weirs, and Polymer Matrix | |
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| Cell Manipulation | |
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| Electroporation | |
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| Cell Lysis | |
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| Cell-Based Sensors | |
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| Nucleic Acids | |
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| Purification | |
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| Amplification: Polymerase Chain Reaction | |
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| Hybridization: Microchannel and Microarray | |
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| Sequencing | |
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| Integrated Genetic Analysis Systems | |
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| Proteins | |
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| Immunoassays | |
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| Enzymatic Assays | |
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| Problems | |
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| References | |
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| Clinical Monitoring | |
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| Flow Cytometry | |
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| Microdialysis | |
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| Catheter-Based Sensors | |
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| Endoscopy | |
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| Point of Care | |
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| Problems | |
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| References | |
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| MEMS Implants and Bioelectric Interfaces | |
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| Implantable MEMS | |
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| Microelectrodes and Neural Probes | |
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| Implantable Sensors | |
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| Drug Delivery | |
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| Tissue Engineering | |
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| Problems | |
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| References | |
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| Index | |