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Smart Sensors and MEMS

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ISBN-10: 1402029276

ISBN-13: 9781402029271

Edition: 2004

Authors: Sergey Y. Yurish, Maria Teresa S. R. Gomes

List price: $349.99
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The book Smart Sensors and MEMS provides an unique collection of contributions on the latest achievements in sensors area and technologies that have been made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the…    
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Book details

List price: $349.99
Copyright year: 2004
Publisher: Springer Netherlands
Publication date: 3/7/2005
Binding: Hardcover
Pages: 480
Size: 6.50" wide x 9.50" long x 1.25" tall
Weight: 1.980

Smart sensors for electrical and non-electrical, physical and chemical variables, state-of-the-art
Novel conversion methods for self-adaptive smart sensors
Resonant piezoelectric devices as physical and biochemical sensors
Acoustic-wave piezoelectric and pyroelectric sensors based on PZT thick films
Wireless passive SAW identification marks and sensors
Precise vectorial magnetic sensors
Micro-hall magnetic sensors : physics, technologies and applications
Modern silicon-based MEMS technology
Porous silicon : technology and applications for micromachining and MEMS
Thermal design of microelectronics systems
Chemical and biological sensors based on microcantilevers
Uncooled infrared MEMS detectors
Bulk acoustic wave sensors in chemical analysis
Electronic biosensors based on biomaterial-nanoparticle hybrid systems