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Robotics for Electronics Manufacturing Principles and Applications in Cleanroom Automation

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ISBN-10: 0521876524

ISBN-13: 9780521876520

Edition: 2010

Authors: Karl Mathia

List price: $205.95
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Book details

List price: $205.95
Copyright year: 2010
Publisher: Cambridge University Press
Publication date: 5/6/2010
Binding: Hardcover
Pages: 250
Size: 7.25" wide x 10.25" long x 0.75" tall
Weight: 1.430
Language: English

Dr Karl Mathia is president of Zidecs Automation, an engineering firm in Silicon Valley with focus on motion control, robotics, and adaptive systems.

Preface
Industrial robotics
History of industrial robotics
The global robotics industry
Applications and operational stock by region
Socioeconomic impact
Definitions, standards, and terminology
Applicable and related standards
Cleanroom robotics
Manufacturing in cleanroom environments
Semiconductor manufacturing
Flat panel display manufacturing
Substrate-handling, robots
Applicable and related standards
Design of atmospheric robots
Clean materials
Prevention of electrostatic charge
Surface finishes for cleanroom robotics
Clean drive trains
Arm compliance
End-effectors
Robot assembly and handling
Applicable and related standards
Design of vacuum robots
Robotics challenges in vacuum environments
What is vacuum?
Static vacuum barrier
Dynamic vacuum barrier
Clean drive trains
External and internal leaks
Materials and surface finishes
Assembly and installation of vacuum robots
Applicable and related standards
Kinematics
Joint space, operational space, and workspace
Kinematic robot structures
Mathematical foundations
Forward kinematics
Inverse kinematics
Commercial substrate-handling robots
Applicable and related standards
Dynamics and control
Manipulator dynamics
Robot motion control
Networked, decentralized robot control
Applicable and related standards
Test and characterization
Airborne particle contamination
Surface particle contamination
Positioning accuracy and repeatability
Path accuracy and repeatability
Vibration analysis
Mechanical axis decoupling
Applicable and related standards
SI units and conversion tables
Standards organizations
Standard temperature and pressure (STP)
References
Index