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Focused Ion Beam Systems Basics and Applications

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ISBN-10: 0521831997

ISBN-13: 9780521831994

Edition: 2007

Authors: Nan Yao

List price: $160.00
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The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume comprehensively covers the state-of-the-art in ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation,…    
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Book details

List price: $160.00
Copyright year: 2007
Publisher: Cambridge University Press
Publication date: 9/13/2007
Binding: Hardcover
Pages: 408
Size: 7.00" wide x 9.75" long x 1.00" tall
Weight: 2.090
Language: English

NAN YAO holds several positions at Princeton University, New Jersey. He is director of the Imaging and Analysis Center; Senior Research Scholar at the Institute for the Science and Technology of Materials; and a lecturer in Mechanical and Aerospace Engineering.

List of contributors
Introduction to the focused ion beam system
Interaction of ions with matter
Gas assisted ion beam etching and deposition
Imaging using electrons and ion beams
Characterization methods using FIB/SEM DualBeam instrumentation
High-density FIB-SEM 3D nanotomography: with applications of real-time imaging during FIB milling
Fabrication of nanoscale structures using ion beams
Preparation for physico-chemical analysis
In-situ sample manipulation and imaging
Micro-machining and mask repair
Three-dimensional visualization of nanostructured materials using focused ion beam tomography
Ion beam implantation of surface layers
Applications for biological materials
Focused ion beam systems as a multifunctional tool for nanotechnology