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Soft X-Rays and Extreme Ultraviolet Radiation Principles and Applications

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ISBN-10: 052102997X

ISBN-13: 9780521029971

Edition: 2006

Authors: David Attwood

List price: $77.00
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Description:

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies,…    
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Book details

List price: $77.00
Copyright year: 2006
Publisher: Cambridge University Press
Publication date: 2/22/2007
Binding: Paperback
Pages: 504
Size: 8.00" wide x 10.00" long x 1.00" tall
Weight: 1.892
Language: English

Preface
Acknowledgements
Introduction
Radiation and scattering at EUV and soft x-ray wavelengths
Wave propagation and refractive index at EUV and soft x-ray wavelengths
Multilayer interference coatings
Synchrotron radiation
Physics of hot dense plasmas
Extreme ultraviolet and soft x-ray lasers
Coherence at short wavelengths
Soft x-ray microscopy with diffractive optics
Extreme ultraviolet and x-ray lithography
Appendices
Index