Physics of Micro/Nano-Fabrication

Name: Physics of Micro/Nano-Fabrication
Price: 27.75 USD
Availability: InStock
ISBN: 9780306441462

ISBN-10: 0306441462

ISBN-13: 9780306441462

Edition: 2nd 1992

Authors: Ivor Brodie, Julius J. Muray

List price: $219.99

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Description:

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Book details

List price: $219.99
Edition: 2nd
Copyright year: 1992
Publisher: Springer
Publication date: 1/31/1993
Binding: Hardcover
Pages: 622
Size: 7.01" wide x 10.00" long x 1.50" tall
Weight: 7.238
Language: English




Preliminary Survey



Microelectronic Devices



Planar Processing



Microanalysis



Microdevices



Particle Beams: Sources, Optics, and Interactions



Electron Sources



Ion Sources



Electron Guns



Components for Electron and Ion Optics



Electron Interactions



Ion Interactions



Photon Sources and Interactions



Photon Interactions



Plasmas: Physics and Chemistry



General Background



Collision Processes



Electron Motion in a Gas Discharge



Collective Phenomena in Plasmas



Radio Frequency Glow Discharges



Plasma Chemistry



Vacuum Physics



Layering Technologies



Epitaxy



Chemical Vapor Deposition (CVD)



Doping by Thermal Diffusion



Doping by Ion Implantation



Evaporation in Ultrahigh Vacuum



Cathodic Sputtering



Organic Layer Formation



Selective Layer Removal Technologies



Thickness and Rate Measurement



Laser-Assisted Processes



Electron-Beam-Assisted Processes



Ion-Beam-Assisted Processes



Nucleation and Growth in Layer Formation



Pattern Generation



Optical Lithography



The Physics of Photoresists



Projection Systems



Holographic Lithography



X-ray Lithography



Synchrotron Radiation for X-ray Lithography



Electron-Beam Lithography



Ion-Beam Lithography



Microcharacterization



Parallel Imaging



Serial (Scanning) Imaging



Limits to Nanofabrication



Limits for MOS Devices



Limits for Pattern Generation



Nanostructures


Appendixes


Author Index


Subject Index