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Physics of Micro/Nano-Fabrication

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ISBN-10: 0306441462

ISBN-13: 9780306441462

Edition: 2nd 1992

Authors: Ivor Brodie, Julius J. Muray

List price: $299.99
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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
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Book details

List price: $299.99
Edition: 2nd
Copyright year: 1992
Publisher: Springer
Publication date: 1/31/1993
Binding: Hardcover
Pages: 622
Size: 6.75" wide x 10.25" long x 1.50" tall
Weight: 2.992
Language: English

Preliminary Survey
Microelectronic Devices
Planar Processing
Particle Beams: Sources, Optics, and Interactions
Electron Sources
Ion Sources
Electron Guns
Components for Electron and Ion Optics
Electron Interactions
Ion Interactions
Photon Sources and Interactions
Photon Interactions
Plasmas: Physics and Chemistry
General Background
Collision Processes
Electron Motion in a Gas Discharge
Collective Phenomena in Plasmas
Radio Frequency Glow Discharges
Plasma Chemistry
Vacuum Physics
Layering Technologies
Chemical Vapor Deposition (CVD)
Doping by Thermal Diffusion
Doping by Ion Implantation
Evaporation in Ultrahigh Vacuum
Cathodic Sputtering
Organic Layer Formation
Selective Layer Removal Technologies
Thickness and Rate Measurement
Laser-Assisted Processes
Electron-Beam-Assisted Processes
Ion-Beam-Assisted Processes
Nucleation and Growth in Layer Formation
Pattern Generation
Optical Lithography
The Physics of Photoresists
Projection Systems
Holographic Lithography
X-ray Lithography
Synchrotron Radiation for X-ray Lithography
Electron-Beam Lithography
Ion-Beam Lithography
Parallel Imaging
Serial (Scanning) Imaging
Limits to Nanofabrication
Limits for MOS Devices
Limits for Pattern Generation
Author Index
Subject Index