Fabrication Engineering at the Micro- and Nanoscale
Edition: 3rd 2007
List price: $97.95
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Description: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite--the Silvaco AthenaRG set of codes--to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition. The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.
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All the information you need in one place! Each Study Brief is a summary of one specific subject; facts, figures, and explanations to help you learn faster.
List price: $97.95
Copyright year: 2007
Publisher: Oxford University Press, Incorporated
Publication date: 9/17/2007
Size: 7.50" wide x 9.25" long x 1.00" tall
|An Introduction to Microelectronic Fabrication|
|Rapid Thermal Processing|
|Nonoptical Lithographic Techniques|
|Vacuum Science and Plasmas|
|Physical Deposition: Evaporation and Sputtering|
|Chemical Vapor Deposition|
|Device Isolation, Contacts, and Metallization|
|Other Transistor Technologies|
|Integrated Circuit Manufacturing|
|Acronyms and Common Symbols|
|Properties of Selected Semiconductor Materials|
|Some properties of the Error Function|