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Foundations of MEMS

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ISBN-10: 0131472860

ISBN-13: 9780131472860

Edition: 2006

Authors: Chang Liu

List price: $132.00
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Book details

List price: $132.00
Copyright year: 2006
Publisher: Prentice Hall PTR
Publication date: 8/26/2005
Binding: Hardcover
Pages: 576
Size: 7.50" wide x 9.25" long x 1.25" tall
Weight: 2.332
Language: English

Introduction
Preview
The History of MEMS Development
The Intrinsic Characteristics of MEMS
Devices: Sensors and Actuators
Introduction to Microfabrication
Preview
Overview of Microfabrication
The Microelectronics Fabrication Process
Silicon-based MEMS Process
New Materials and Fabrication Processes
Points of Consideration for Processing
Review of Essential Electrical and Mechanical Concepts
Preview
Conductivity of Semiconductors
Crystal Planes and Orientations
Stress and Strain
Flexural Beam Bending Analysis Under Simple Loading Conditions
Torsional Deflections
Intrinsic Stress
Resonant Frequency and Quality Factor
Active Tuning of Spring Constant and Resonant Frequency
A List of Suggested Courses and Books
Electrostatic Sensing and Actuation
Preview
Introduction to Electrostatic Sensors and Actuators
Parallel-Plate Capacitors
Applications of Parallel-Plate Capacitors
Interdigitated Finger Capacitors
Applications of Comb-Drive Devices
Thermal Sensing and Actuation
Preview
Introduction
Sensors and Actuators Based on Thermal Expansion
Thermal Couplesnbsp
Thermal Resistors
Applications
Piezoresistive Sensors
Preview
Origin and Expression of Piezoresistivity
Piezoresistive Sensor Materials
Stress Analysis of Mechanical Elements
Applications of Piezoresistive Sensors
Piezoelectric Sensing and Actuation
Preview
Introduction
Properties of Piezoelectric Materials
Applications
Magnetic Actuation
Preview
Essential Concepts and Principles
Fabrication of Micromagnetic Components
Case Studies of MEMS Magnetic Actuators
Summary of Sensing and Actuation
Preview
Comparison of Major Sensing and Actuation Methods
Tunneling Sensing
Optical Sensing
Field Effect Transistors
Radio Frequency Resonance Sensing
Bulk Micromachining and Silicon Anisotropic Etching
Preview
Introduction
Anisotropic Wet Etching
Dry Etching of Silicon - Plasma Etching
Deep Reactive Ion Etching (DRIE)
Isotropic Wet Etching
Gas-Phase Etchants
Native Oxide
Wafer bonding
Case Studies
Surface Micromachining
Preview
Basic Surface Micromachining Processes
Structural and Sacrificial Materials
Acceleration of Sacrificial Etch
Stiction and AntiStiction Methods
Assembly of 3D MEMS
Foundry Process
Polymer MEMS
Previ