| |
| |
Preface | |
| |
| |
| |
Design at Resonance of Mechanical Microsystems | |
| |
| |
| |
Introduction | |
| |
| |
| |
Single-Degree-of-Freedom Systems | |
| |
| |
| |
Free Response | |
| |
| |
| |
Forced Response-the Resonance | |
| |
| |
| |
Loss Mechanisms in Mechanical Microresonators | |
| |
| |
| |
Multiple-Degree-of-Freedom Systems | |
| |
| |
| |
Approximate Methods for Resonant Frequencies Calculation | |
| |
| |
| |
Eigenvalues, Eigenvectors, and Mode Shapes | |
| |
| |
| |
Lagrange's Equations | |
| |
| |
| |
Mechanical-Electrical Analogies for Microsystems | |
| |
| |
| |
Laplace Transforms, Transfer Functions, and Complex Impedances | |
| |
| |
References | |
| |
| |
| |
Basic Members: Lumped- and Distributed-Parameter Modeling and Design | |
| |
| |
| |
Introduction | |
| |
| |
| |
Lumped-Parameter Modeling and Design | |
| |
| |
| |
Lumped-Parameter Stiffnesses and Compliances | |
| |
| |
| |
Lumped-Parameter Inertia Properties | |
| |
| |
| |
Constant-Cross-Section Members | |
| |
| |
| |
Variable-Cross-Section Members | |
| |
| |
| |
Distributed-Parameter Modeling and Design | |
| |
| |
| |
Line Micromembers | |
| |
| |
| |
Circular Rings | |
| |
| |
| |
Thin Plates and Membranes | |
| |
| |
References | |
| |
| |
| |
Microhinges and Microcantilevers: Lumped-Parameter Modeling and Design | |
| |
| |
| |
Introduction | |
| |
| |
| |
Compliance Transforms by Reference Frame Translation | |
| |
| |
| |
Compliances in Opposite-End Reference Frames | |
| |
| |
| |
Compliances in Arbitrarily Translated Reference Frames | |
| |
| |
| |
Micromembers Formed of Two Compliant Segments | |
| |
| |
| |
Paddle Microcantilevers | |
| |
| |
| |
Filleted Microcantilevers | |
| |
| |
| |
Filleted Microhinges | |
| |
| |
| |
Circularly Notched Microcantilevers | |
| |
| |
| |
Hollow Microcantilevers | |
| |
| |
| |
Rectangular Microcantilevers | |
| |
| |
| |
Trapezoid Microcantilevers | |
| |
| |
| |
Sandwiched Microcantilevers (Multimorphs) | |
| |
| |
| |
Microcantilevers of Equal-Length Layers | |
| |
| |
| |
Microcantilevers of Dissimilar-Length Layers | |
| |
| |
| |
Resonant Microcantilever Arrays | |
| |
| |
References | |
| |
| |
| |
Microbridges: Lumped-Parameter Modeling and Design | |
| |
| |
| |
Introduction | |
| |
| |
| |
Microbridges of Constant Cross Section | |
| |
| |
| |
Bending Resonant Frequency | |
| |
| |
| |
Torsion Resonant Frequency | |
| |
| |
| |
Sandwiched Microbridges (Multimorphs) | |
| |
| |
| |
Multimorph Microbridges of Equal-Length Layers | |
| |
| |
| |
Multimorph Microbridges of Dissimilar-Length Layers | |
| |
| |
| |
Microbridges of Variable Cross Section | |
| |
| |
| |
Compliance Transform | |
| |
| |
| |
Generic Formulation for Single-Profile (Basic Shape) Microbridges | |
| |
| |
| |
Serially Compounded Microbridges | |
| |
| |
| |
Resonator Microbridge Arrays | |
| |
| |
References | |
| |
| |
| |
Resonant Micromechanical Systems | |
| |
| |
| |
Introduction | |
| |
| |
| |
Beam-Type Microresonators | |
| |
| |
| |
Resonant Frequency Models for Microcantilevers | |
| |
| |
| |
Resonant Frequency Models for Microbridges | |
| |
| |
| |
Other Examples of Beam-Type Microresonators | |
| |
| |
| |
Spring-Type Microresonators | |
| |
| |
| |
Transduction in Microresonators | |
| |
| |
| |
Electrostatic Transduction | |
| |
| |
| |
Electromagnetic Transduction | |
| |
| |
| |
Piezoelectric and Piezomagnetic Transduction | |
| |
| |
| |
Resonant Microgyroscopes | |
| |
| |
| |
Tuning Forks | |
| |
| |
| |
Resonant Accelerometers | |
| |
| |
References | |
| |
| |
| |
Microcantilever and Microbridge Systems for Mass Detection | |
| |
| |
| |
Introduction | |
| |
| |
| |
General Model of Point-Mass Addition Detection by Means of the Resonance Shift Method | |
| |
| |
| |
Mass Detection by Means of Microcantilevers | |
| |
| |
| |
Constant-Cross-Section Microcantilevers | |
| |
| |
| |
Variable-Cross-Section Microcantilevers | |
| |
| |
| |
Mass Detection by Means of Microbridges | |
| |
| |
| |
Constant-Cross-Section Microbridges | |
| |
| |
| |
Variable-Cross-Section Microbridges | |
| |
| |
| |
Mass Detection by Means of Partially Compliant, Partial-Inertia Microdevices | |
| |
| |
| |
Paddle Microcantilevers | |
| |
| |
| |
Paddle Microbridges | |
| |
| |
References | |
| |
| |
Index | |