| |
| |
| |
| Lithography | |
| |
| |
| Introduction | |
| |
| |
| Historical Note: Lithography's Origins | |
| |
| |
| Photolithography Overview | |
| |
| |
| Critical Dimension, Overall Resolution, Line Width | |
| |
| |
| Lithographic Sensitivity and Intrinsic Resist Sensitivity (Photochemical Quantum Efficiency) | |
| |
| |
| Resist Profiles | |
| |
| |
| Contrast and Experimental Determination of Lithographic Sensitivity | |
| |
| |
| Resolution in Photolithography | |
| |
| |
| Photolithography Resolution Enhancement Technology | |
| |
| |
| Beyond Moore's Law | |
| |
| |
| Next-Generation Lithographies | |
| |
| |
| Emerging Lithography Technologies | |
| |
| |
| Examples | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| Pattern Transfer with Dry Etching Techniques | |
| |
| |
| Introduction | |
| |
| |
| Dry Etching: Definitions and Jargon | |
| |
| |
| Plasmas or Discharges | |
| |
| |
| Physical Etching: Ion Etching or Sputtering and Ion-Beam Milling | |
| |
| |
| Plasma Etching (Radical Etching) | |
| |
| |
| Physical/Chemical Etching | |
| |
| |
| Deep Reactive Ion Etching (DRIE) | |
| |
| |
| Vapor-Phase Etching without Plasma (XeF[subscript 2]) | |
| |
| |
| Dry Etching Models--In Situ Monitoring | |
| |
| |
| Comparing Wet and Dry Etching | |
| |
| |
| Examples | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| Pattern Transfer with Additive Techniques | |
| |
| |
| Introduction | |
| |
| |
| Silicon Growth | |
| |
| |
| Doping of Si | |
| |
| |
| Oxidation of Silicon | |
| |
| |
| Physical Vapor Deposition | |
| |
| |
| Chemical Vapor Deposition | |
| |
| |
| Silk-Screening or Screen Printing | |
| |
| |
| Sol-Gel Deposition Technique | |
| |
| |
| Doctor's Blade or Tape Casting | |
| |
| |
| Plasma Spraying | |
| |
| |
| Deposition and Arraying Methods of Organic Layers in BIOMEMS | |
| |
| |
| Thin vs. Thick Film Deposition | |
| |
| |
| Selection Criteria for Deposition Method | |
| |
| |
| Examples | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| Wet Bulk Micromachining | |
| |
| |
| Introduction | |
| |
| |
| Historical Note | |
| |
| |
| Silicon Crystallography | |
| |
| |
| Silicon as Substrate | |
| |
| |
| Silicon as a Mechanical Element in MEMS | |
| |
| |
| Other Si Sensor Properties | |
| |
| |
| Wet Isotropic and Anisotropic Etching | |
| |
| |
| Etching with Bias and/or Illumination of the Semiconductor | |
| |
| |
| Etch-Stop Techniques | |
| |
| |
| Issues in Wet Bulk Micromachining | |
| |
| |
| Computer Simulation Software | |
| |
| |
| Examples | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| Surface Micromachining | |
| |
| |
| Introduction | |
| |
| |
| Historical Note | |
| |
| |
| Mechanical Properties of Thin Films | |
| |
| |
| Surface Micromachining Processes | |
| |
| |
| Poly-Si Surface Micromachining Modifications | |
| |
| |
| Surface Micromachining Modifications Not Involving Polysilicon | |
| |
| |
| Comparison of Bulk Micromachining with Surface Micromachining | |
| |
| |
| Materials Case Studies | |
| |
| |
| Examples | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| Liga and Micromolding | |
| |
| |
| Introduction | |
| |
| |
| Liga--Background | |
| |
| |
| Liga and Liga-Like Process Steps | |
| |
| |
| Examples | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing | |
| |
| |
| Introduction | |
| |
| |
| Absolute and Relative Tolerance in Manufacturing | |
| |
| |
| Historical Note: Human Manufacturing | |
| |
| |
| |
| Top-Down Manufacturing Methods | |
| |
| |
| |
| Bottom-Up Approaches | |
| |
| |
| Examples | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice | |
| |
| |
| Introduction | |
| |
| |
| Modeling | |
| |
| |
| Brains in MEMS | |
| |
| |
| Packaging | |
| |
| |
| Sample Preparation in Molecular Diagnostics | |
| |
| |
| Substrate Choice | |
| |
| |
| Examples | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| Scaling, Actuators, and Power in Miniaturized Systems | |
| |
| |
| Introduction | |
| |
| |
| Scaling | |
| |
| |
| Actuators | |
| |
| |
| Fluidics | |
| |
| |
| Thermal Actuators | |
| |
| |
| Scaling in Analytical Separation Equipment | |
| |
| |
| Other Actuators | |
| |
| |
| Power in MEMS | |
| |
| |
| Examples | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| Miniaturization Applications | |
| |
| |
| Introduction | |
| |
| |
| Definitions and Classification Method | |
| |
| |
| Decision Tree | |
| |
| |
| Overall Market for Micromachines | |
| |
| |
| MEMS in the Automotive Market | |
| |
| |
| MEMS in Medical and Biomedical Markets | |
| |
| |
| Environmental Monitoring | |
| |
| |
| Industrial/Automation | |
| |
| |
| IT/Peripheral | |
| |
| |
| Telecommunications | |
| |
| |
| Problems | |
| |
| |
| References | |
| |
| |
| |
| Metrology Techniques for MEMS | |
| |
| |
| |
| Living Book | |
| |
| |
| |
| Si and SiO[subscript 2] Etch Rates in KOH | |
| |
| |
| |
| Genetics | |
| |
| |
| The 20 Amino Acids Found in Biological Systems | |
| |
| |
| The Genetic Code | |
| |
| |
| |
| Suggested Further Reading | |
| |
| |
| Books on Top-Down and Bottom-Up Miniaturization | |
| |
| |
| Journals and Periodicals on Micromachining and Sensors | |
| |
| |
| Series on Micromachining and Sensors | |
| |
| |
| Market Studies on Micromachining and Sensors | |
| |
| |
| Important Proceedings/Conferences on Micromachining and Sensors | |
| |
| |
| |
| MEMS Companies | |
| |
| |
| |
| Glossary | |
| |
| |
| Index | |