Fundamentals of Microfabrication The Science of Miniaturization

ISBN-10: 0849308267
ISBN-13: 9780849308260
Edition: 2nd 2002 (Revised)
Authors: Marc J. Madou
List price: $133.95
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Description: This text provides the background tools needed to confidently choose fabrication methods and materials for a particular miniaturization problem.

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Book details

List price: $133.95
Edition: 2nd
Copyright year: 2002
Publisher: CRC Press
Publication date: 3/13/2002
Binding: Hardcover
Pages: 752
Size: 8.75" wide x 11.00" long x 2.00" tall
Weight: 4.334
Language: English

This text provides the background tools needed to confidently choose fabrication methods and materials for a particular miniaturization problem.

Lithography
Introduction
Historical Note: Lithography's Origins
Photolithography Overview
Critical Dimension, Overall Resolution, Line Width
Lithographic Sensitivity and Intrinsic Resist Sensitivity (Photochemical Quantum Efficiency)
Resist Profiles
Contrast and Experimental Determination of Lithographic Sensitivity
Resolution in Photolithography
Photolithography Resolution Enhancement Technology
Beyond Moore's Law
Next-Generation Lithographies
Emerging Lithography Technologies
Examples
Problems
References
Pattern Transfer with Dry Etching Techniques
Introduction
Dry Etching: Definitions and Jargon
Plasmas or Discharges
Physical Etching: Ion Etching or Sputtering and Ion-Beam Milling
Plasma Etching (Radical Etching)
Physical/Chemical Etching
Deep Reactive Ion Etching (DRIE)
Vapor-Phase Etching without Plasma (XeF[subscript 2])
Dry Etching Models--In Situ Monitoring
Comparing Wet and Dry Etching
Examples
Problems
References
Pattern Transfer with Additive Techniques
Introduction
Silicon Growth
Doping of Si
Oxidation of Silicon
Physical Vapor Deposition
Chemical Vapor Deposition
Silk-Screening or Screen Printing
Sol-Gel Deposition Technique
Doctor's Blade or Tape Casting
Plasma Spraying
Deposition and Arraying Methods of Organic Layers in BIOMEMS
Thin vs. Thick Film Deposition
Selection Criteria for Deposition Method
Examples
Problems
References
Wet Bulk Micromachining
Introduction
Historical Note
Silicon Crystallography
Silicon as Substrate
Silicon as a Mechanical Element in MEMS
Other Si Sensor Properties
Wet Isotropic and Anisotropic Etching
Etching with Bias and/or Illumination of the Semiconductor
Etch-Stop Techniques
Issues in Wet Bulk Micromachining
Computer Simulation Software
Examples
Problems
References
Surface Micromachining
Introduction
Historical Note
Mechanical Properties of Thin Films
Surface Micromachining Processes
Poly-Si Surface Micromachining Modifications
Surface Micromachining Modifications Not Involving Polysilicon
Comparison of Bulk Micromachining with Surface Micromachining
Materials Case Studies
Examples
Problems
References
Liga and Micromolding
Introduction
Liga--Background
Liga and Liga-Like Process Steps
Examples
Problems
References
A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing
Introduction
Absolute and Relative Tolerance in Manufacturing
Historical Note: Human Manufacturing
Top-Down Manufacturing Methods
Bottom-Up Approaches
Examples
Problems
References
Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice
Introduction
Modeling
Brains in MEMS
Packaging
Sample Preparation in Molecular Diagnostics
Substrate Choice
Examples
Problems
References
Scaling, Actuators, and Power in Miniaturized Systems
Introduction
Scaling
Actuators
Fluidics
Thermal Actuators
Scaling in Analytical Separation Equipment
Other Actuators
Power in MEMS
Examples
Problems
References
Miniaturization Applications
Introduction
Definitions and Classification Method
Decision Tree
Overall Market for Micromachines
MEMS in the Automotive Market
MEMS in Medical and Biomedical Markets
Environmental Monitoring
Industrial/Automation
IT/Peripheral
Telecommunications
Problems
References
Metrology Techniques for MEMS
Living Book
Si and SiO[subscript 2] Etch Rates in KOH
Genetics
The 20 Amino Acids Found in Biological Systems
The Genetic Code
Suggested Further Reading
Books on Top-Down and Bottom-Up Miniaturization
Journals and Periodicals on Micromachining and Sensors
Series on Micromachining and Sensors
Market Studies on Micromachining and Sensors
Important Proceedings/Conferences on Micromachining and Sensors
MEMS Companies
Glossary
Index

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