Delta-Doping of Semiconductors

Name: Delta-Doping of Semiconductors
Price: 75.27 USD
Availability: InStock
ISBN: 9780521017961

ISBN-10: 0521017963

ISBN-13: 9780521017961

Edition: 2005

Authors: E. F. Schubert

List price: $76.99

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Description:

Doping profiles are a key element in the development of modern semiconductor technology. This book is the first to give a comprehensive review of the theory, fabrication, characterization, and device applications of abrupt, shallow, and narrow doping profiles in semiconductors. After an introductory chapter sets out the basic theoretical and experimental concepts involved, the authors discuss the fabrication of abrupt and narrow doping profiles by several different techniques, including epitaxial growth. They then present the techniques for characterizing doping distributions, followed by several chapters on the inherent physical properties of narrow doping profiles. The latter part of the…

Book details

List price: $76.99
Copyright year: 2005
Publisher: Cambridge University Press
Publication date: 8/22/2005
Binding: Paperback
Pages: 620
Size: 7.48" wide x 9.72" long x 1.22" tall
Weight: 2.376
Language: English







Introduction







Electronic structure of delta-doped semiconductors







Recent progress in delta-like confinement of impurities in GaAs




Flow-rate modulation epitaxy (FME) of III-V semiconductors




Gas source molecular beam epitaxy (MBE) of delta-doped III-V semiconductors




Solid phase epitaxy for delta-doping in silicon




Low temperature MBE of silicon







Secondary ion mass spectrometry of delta-doped semiconductors




Capacitance-voltage profiling




Redistribution of impurities in III-V semiconductors




Dopant diffusion and segregation in delta-doped silicon films




Characterisation of silicon and delta-doped structures in GaAs




The DX-center in silicon delta-doped GaAs and AlxGa1-xAs







Luminescence and ellipsometry spectroscopy




Photoluminescence and Raman spectroscopy of single delta-doped III-V semiconductor heterostructures




Electron transport in delta-doped quantum wells




Electron mobility in delta-doped layers




Hot electrons in delta-doped GaAs




Ordered delta-doping







Delta-doped channel III-V field effect transistors (FETs)




Selectively doped heterostructure devices




Silicon atomic layer doping FET




Planar doped barrier devices




Silicon interband and intersubband photodetectors




Doping superlattice devices