Semiconductor Material and Device Characterization

ISBN-10: 0471739065

ISBN-13: 9780471739067

Edition: 3rd 2006 (Revised)

List price: $204.00 Buy it from $53.28
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Description:

Semiconductor Material and Device Characterizationis the only book on the market devoted to the characterization techniques used by the modern semiconductor industry to measure diverse semiconductor materials and devices. It covers the full range of electrical and optical characterization methods while thoroughly treating the more specialized chemical and physical techniques.In the third edition, Professor Schroder has rewritten parts of each chapter and added two new chapters (Charge Based Measurements and Failure Analysis and Reliability), redrawn and updated most figures, and included new problems and approximately 100 new references.* New end of chapter problems* Outdated figures have been redone and replaced with current data* Up-to-date bibliography with over 1400 references* Professor Schroder is recognized as the authority in the field of semiconductor characterization
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Book details

List price: $204.00
Edition: 3rd
Copyright year: 2006
Publisher: John Wiley & Sons, Incorporated
Publication date: 6/29/2015
Binding: Hardcover
Pages: 800
Size: 6.25" wide x 9.25" long x 1.50" tall
Weight: 2.090
Language: English

Preface to Third Edition
Resistivity
Introduction
Two-Point Versus Four-Point Probe
Wafer Mapping
Resistivity Profiling
Contactless Methods
Conductivity Type
Strengths and Weaknesses
Resistivity as a Function of Doping Density
Intrinsic Carrier Density
References
Problems
Review Questions
Carrier and Doping Density
Introduction
Capacitance-Voltage (C-V)
Current-Voltage (I-V)
Measurement Errors and Precautions
Hall Effect
Optical Techniques
Secondary Ion Mass Spectrometry (SIMS)
Rutherford Backscattering (RBS)
Lateral Profiling
Strengths and Weaknesses
Parallel or Series Connection?
Circuit Conversion
References
Problems
Review Questions
Contact Resistance and Schottky Barriers
Introduction
Metal-Semiconductor Contacts
Contact Resistance
Measurement Techniques
Schottky Barrier Height
Comparison of Methods
Strengths and Weaknesses
Effect of Parasitic Resistance
Alloys for Contacts to Semiconductors
References
Problems
Review Questions
Series Resistance, Channel Length and Width, and Threshold Voltage
Introduction
PN Junction Diodes
Schottky Barrier Diodes
Solar Cells
Bipolar Junction Transistors
MOSFETS
MESFETS and MODFETS
Threshold Voltage
Pseudo MOSFET
Strengths and Weaknesses
Schottky Diode Current-Voltage Equation
References
Problems
Review Questions
Defects
Introduction
Generation-Recombination Statistics
Capacitance Measurements
Current Measurements
Charge Measurements
Deep-Level Transient Spectroscopy (DLTS)
Thermally Stimulated Capacitance and Current
Positron Annihilation Spectroscopy (PAS)
Strengths and Weaknesses
Activation Energy and Capture Cross-Section
Time Constant Extraction
Si and GaAs Data
References
Problems
Review Questions
Oxide and Interface Trapped Charges, Oxide Thickness
Introduction
Fixed, Oxide Trapped, and Mobile Oxide Charge
Interface Trapped Charge
Oxide Thickness
Strengths and Weaknesses
Capacitance Measurement Techniques
Effect of Chuck Capacitance and Leakage Current
References
Problems
Review Questions
Carrier Lifetimes
Introduction
Recombination Lifetime/Surface Recombination Velocity
Generation Lifetime/Surface Generation Velocity
Recombination Lifetime-Optical Measurements
Recombination Lifetime-Electrical Measurements
Generation Lifetime-Electrical Measurements
Strengths and Weaknesses
Optical Excitation
Electrical Excitation
References
Problems
Review Questions
Mobility
Introduction
Conductivity Mobility
Hall Effect and Mobility
Magnetoresistance Mobility
Time-of-Flight Drift Mobility
MOSFET Mobility
Contactless Mobility
Strengths and Weaknesses
Semiconductor Bulk Mobilities
Semiconductor Surface Mobilities
Effect of Channel Frequency Response
Effect of Interface Trapped Charge
References
Problems
Review Questions
Charge-based and Probe Characterization
Introduction
Background
Surface Charging
The Kelvin Probe
Applications
Scanning Probe Microscopy (SPM
Strengths and Weaknesses
References
Problems
Review Questions
Optical Characterization
Introduction
Optical Microscopy
Ellipsometry
Transmission
Reflection
Light Scattering
Modulation Spectroscopy
Line Width
Photoluminescence (PL
Raman Spectroscopy
Strengths and Weaknesses
Transmission Equations
Absorption Coefficients and Refractive Indices for SelectedSemiconductors
References
Problems
Review Questions
Chemical and Physical Characterization
Introduction
Electron Beam Techniques
Ion Beam Techniques
X-Ray and Gamma-Ray Techniques
Strengths and Weaknesses
Selected Features of Some Analytical Techniques
References
Problems
Review Questions
Reliability and Failure Analysis
Introduction
Failure Times and Acceleration Factors
Distribution Functions
Reliability Concerns
Failure Analysis Characterization Techniques
Strengths and Weaknesses
Gate Currents
References
Problems
Review Questions
List of Symbols
Abbreviations and Acronyms
Index
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