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Preface to Third Edition | |
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Resistivity | |
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Introduction | |
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Two-Point Versus Four-Point Probe | |
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Wafer Mapping | |
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Resistivity Profiling | |
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Contactless Methods | |
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Conductivity Type | |
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Strengths and Weaknesses | |
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Resistivity as a Function of Doping Density | |
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Intrinsic Carrier Density | |
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References | |
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Problems | |
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Review Questions | |
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Carrier and Doping Density | |
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Introduction | |
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Capacitance-Voltage (C-V) | |
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Current-Voltage (I-V) | |
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Measurement Errors and Precautions | |
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Hall Effect | |
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Optical Techniques | |
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Secondary Ion Mass Spectrometry (SIMS) | |
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Rutherford Backscattering (RBS) | |
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Lateral Profiling | |
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Strengths and Weaknesses | |
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Parallel or Series Connection? | |
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Circuit Conversion | |
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References | |
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Problems | |
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Review Questions | |
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Contact Resistance and Schottky Barriers | |
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Introduction | |
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Metal-Semiconductor Contacts | |
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Contact Resistance | |
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Measurement Techniques | |
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Schottky Barrier Height | |
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Comparison of Methods | |
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Strengths and Weaknesses | |
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Effect of Parasitic Resistance | |
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Alloys for Contacts to Semiconductors | |
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References | |
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Problems | |
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Review Questions | |
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Series Resistance, Channel Length and Width, and Threshold Voltage | |
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Introduction | |
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PN Junction Diodes | |
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Schottky Barrier Diodes | |
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Solar Cells | |
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Bipolar Junction Transistors | |
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MOSFETS | |
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MESFETS and MODFETS | |
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Threshold Voltage | |
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Pseudo MOSFET | |
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Strengths and Weaknesses | |
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Schottky Diode Current-Voltage Equation | |
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References | |
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Problems | |
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Review Questions | |
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Defects | |
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Introduction | |
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Generation-Recombination Statistics | |
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Capacitance Measurements | |
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Current Measurements | |
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Charge Measurements | |
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Deep-Level Transient Spectroscopy (DLTS) | |
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Thermally Stimulated Capacitance and Current | |
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Positron Annihilation Spectroscopy (PAS) | |
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Strengths and Weaknesses | |
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Activation Energy and Capture Cross-Section | |
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Time Constant Extraction | |
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Si and GaAs Data | |
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References | |
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Problems | |
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Review Questions | |
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Oxide and Interface Trapped Charges, Oxide Thickness | |
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Introduction | |
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Fixed, Oxide Trapped, and Mobile Oxide Charge | |
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Interface Trapped Charge | |
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Oxide Thickness | |
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Strengths and Weaknesses | |
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Capacitance Measurement Techniques | |
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Effect of Chuck Capacitance and Leakage Current | |
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References | |
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Problems | |
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Review Questions | |
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Carrier Lifetimes | |
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Introduction | |
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Recombination Lifetime/Surface Recombination Velocity | |
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Generation Lifetime/Surface Generation Velocity | |
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Recombination Lifetime-Optical Measurements | |
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Recombination Lifetime-Electrical Measurements | |
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Generation Lifetime-Electrical Measurements | |
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Strengths and Weaknesses | |
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Optical Excitation | |
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Electrical Excitation | |
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References | |
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Problems | |
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Review Questions | |
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Mobility | |
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Introduction | |
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Conductivity Mobility | |
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Hall Effect and Mobility | |
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Magnetoresistance Mobility | |
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Time-of-Flight Drift Mobility | |
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MOSFET Mobility | |
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Contactless Mobility | |
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Strengths and Weaknesses | |
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Semiconductor Bulk Mobilities | |
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Semiconductor Surface Mobilities | |
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Effect of Channel Frequency Response | |
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Effect of Interface Trapped Charge | |
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References | |
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Problems | |
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Review Questions | |
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Charge-based and Probe Characterization | |
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Introduction | |
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Background | |
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Surface Charging | |
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The Kelvin Probe | |
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Applications | |
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Scanning Probe Microscopy (SPM | |
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Strengths and Weaknesses | |
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References | |
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Problems | |
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Review Questions | |
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Optical Characterization | |
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Introduction | |
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Optical Microscopy | |
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Ellipsometry | |
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Transmission | |
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Reflection | |
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Light Scattering | |
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Modulation Spectroscopy | |
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Line Width | |
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Photoluminescence (PL | |
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Raman Spectroscopy | |
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Strengths and Weaknesses | |
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Transmission Equations | |
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Absorption Coefficients and Refractive Indices for SelectedSemiconductors | |
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References | |
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Problems | |
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Review Questions | |
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Chemical and Physical Characterization | |
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Introduction | |
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Electron Beam Techniques | |
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Ion Beam Techniques | |
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X-Ray and Gamma-Ray Techniques | |
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Strengths and Weaknesses | |
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Selected Features of Some Analytical Techniques | |
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References | |
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Problems | |
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Review Questions | |
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Reliability and Failure Analysis | |
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Introduction | |
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Failure Times and Acceleration Factors | |
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Distribution Functions | |
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Reliability Concerns | |
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Failure Analysis Characterization Techniques | |
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Strengths and Weaknesses | |
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Gate Currents | |
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References | |
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Problems | |
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Review Questions | |
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List of Symbols | |
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Abbreviations and Acronyms | |
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Index | |