Principles of Plasma Discharges and Materials Processing

ISBN-10: 0471720011

ISBN-13: 9780471720010

Edition: 2nd 2005 (Revised)

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In addition to thorough review and updating of the previous edition, this text includes new chapters on dusty plasmas and kinetic theory of discharges.
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Book details

List price: $191.00
Edition: 2nd
Copyright year: 2005
Publisher: John Wiley & Sons, Incorporated
Publication date: 4/14/2005
Binding: Hardcover
Pages: 800
Size: 6.25" wide x 9.50" long x 1.75" tall
Weight: 3.146
Language: English

Introduction
Basic Plasma Equations and Equilibrium
Atomic Collisions
Plasma Dynamics
Diffusion and Transport
DC Sheaths
Chemical Reactions and Equilibrium
Molecular Collisions
Chemical Kinetics and Surface Processes
Particle and Energy Balance in Discharges
Capacitive Discharges
Inductive Discharges
Wave-Heated Discharges
DC Discharges
Etching
Deposition and Implantation
Dusty Plasmas
Kinetic Theory of Discharges
Collision Dynamics
The Collision Integral
Diffusion Solutions for Variable Mobility Model
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