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Fabrication Engineering at the Micro- and Nanoscale

ISBN-10: 0199861226
ISBN-13: 9780199861224
Edition: 4th 2013
List price: $167.95 Buy it from $165.42
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Description: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate  More...

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Book details

List price: $167.95
Edition: 4th
Copyright year: 2013
Publisher: Oxford University Press
Publication date: 11/28/2012
Binding: Paperback
Pages: 688
Size: 7.56" wide x 9.29" long x 1.03" tall
Weight: 2.640
Language: English

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

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