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Fabrication Engineering at the Micro- and Nanoscale

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ISBN-10: 0199861226

ISBN-13: 9780199861224

Edition: 4th 2013

Authors: Stephen A. Campbell

List price: $274.99
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Description:

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
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Book details

List price: $274.99
Edition: 4th
Copyright year: 2013
Publisher: Oxford University Press
Publication date: 11/28/2012
Binding: Paperback
Pages: 688
Size: 7.56" wide x 9.29" long x 1.03" tall
Weight: 2.794