Silicon VLSI Technology Fundamentals, Practice and Modeling

Name: Silicon VLSI Technology Fundamentals, Practice and Modeling
Price: 33.32 USD
Availability: InStock
ISBN: 9780130850379

ISBN-10: 0130850373

ISBN-13: 9780130850379

Edition: 2001

Authors: James D. Plummer, Michael D. Deal, Peter B. Griffin

List price: $233.32

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For one-quarter/semester, senior/graduate level courses in Fabrication Processes. Unique in approach, this text provides an integrated view of silicon technologywith an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.

Book details

List price: $233.32
Copyright year: 2001
Publisher: Prentice Hall PTR
Publication date: 7/14/2000
Binding: Paperback
Pages: 832
Size: 7.75" wide x 9.25" long x 1.25" tall
Weight: 3.146
Language: English




Introduction and Historical Perspective


Introduction


Integrated Circuits and the Planar Process-Key Inventions That Made It All Possible


Semiconductors


Semiconductor Devices


Semiconductor Circuit Families


Modern Scientific Discovery-Experiments, Theory and Computer Simulation


The Plan for This Book



Modern CMOS Technology


CMOS Process Flow



Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers



Semiconductor Manufacturing- Clean Rooms, Wafer Cleaning and Gettering



Lithography



Thermal Oxidation and the Si/SiO 2 Interface



Dopant Diffusion



Ion Implantation



Thin Film Deposition



Etching



Backend Technology