Silicon VLSI Technology Fundamentals, Practice and Modeling

ISBN-10: 0130850373
ISBN-13: 9780130850379
Edition: 2001
List price: $234.60 Buy it from $25.35 Rent it from $60.86
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Description: For one-quarter/semester, senior/graduate level courses in Fabrication Processes. Unique in approach, this text provides an integrated view of silicon technologywith an emphasis on modern computer simulation. It describes not only the manufacturing  More...

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Book details

List price: $234.60
Copyright year: 2001
Publisher: Prentice Hall PTR
Publication date: 7/14/2000
Binding: Paperback
Pages: 817
Size: 7.75" wide x 9.25" long x 1.25" tall
Weight: 3.454
Language: English

For one-quarter/semester, senior/graduate level courses in Fabrication Processes. Unique in approach, this text provides an integrated view of silicon technologywith an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.

Introduction and Historical Perspective
Introduction
Integrated Circuits and the Planar Process-Key Inventions That Made It All Possible
Semiconductors
Semiconductor Devices
Semiconductor Circuit Families
Modern Scientific Discovery-Experiments, Theory and Computer Simulation
The Plan for This Book
Modern CMOS Technology
CMOS Process Flow
Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers
Semiconductor Manufacturing- Clean Rooms, Wafer Cleaning and Gettering
Lithography
Thermal Oxidation and the Si/SiO 2 Interface
Dopant Diffusion
Ion Implantation
Thin Film Deposition
Etching
Backend Technology

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