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Semiconductor Manufacturing Technology

ISBN-10: 0130815209
ISBN-13: 9780130815200
Edition: 2001
List price: $252.40
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Description: Providing helpful, up-to-date technical information about semiconductor manufacturing, this text strikes a balance between the process and equipment technology found in wafer fabrications.

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Book details

List price: $252.40
Copyright year: 2001
Publisher: Prentice Hall PTR
Publication date: 11/9/2000
Binding: Hardcover
Pages: 666
Size: 8.75" wide x 11.50" long x 1.25" tall
Weight: 3.806
Language: English

Providing helpful, up-to-date technical information about semiconductor manufacturing, this text strikes a balance between the process and equipment technology found in wafer fabrications.

Introduction to the Semiconductor Industry
Characteristics of Semiconductor Materials
Device Technologies
Silicon and Wafer Preparation
Chemicals in Semiconductor Fabrication
Contamination Controls in Wafer Fabs
Metrology and Defect Inspection
Gas Control in Process Chambers
IC Fabrication Process Overview
Oxidation
Deposition
Metallization
Photolithography: Vapor Prime to Soft Bake
Photolithography: Alignment and Exposure
Photolithography: Photoresist Development and Advanced Lithography
Etch
Ion Implant
Chemical Mechanical Planarization
Wafer Test
Assembly and Packaging
Appendices
Glossary
Index

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