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A Historical Perspective | |
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A Review of Materials Science | |
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Introduction | |
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Structure | |
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Defects in Solids | |
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Bonds and Bands in Materials | |
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Thermodynamics of Materials | |
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Kinetics | |
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Nucleation | |
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An Introduction to Mechanical Behavior | |
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Conclusion | |
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Vacuum Science and Technology | |
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Introduction | |
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Kinetic Theory of Gases | |
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Gas Transport and Pumping | |
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Vacuum Pumps | |
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Vacuum Systems | |
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Conclusion | |
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Thin-Film Evaporation Processes | |
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Introduction | |
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The Physics and Chemistry of Evaporation | |
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Film Thickness Uniformity and Purity | |
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Evaporation Hardware | |
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Evaporation Processes and Applications | |
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Conclusion | |
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Discharges, Plasmas, and Ion-Surface Interactions | |
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Introduction | |
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Plasmas, Discharges, and Arcs | |
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Fundamentals of Plasma Physics | |
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Reactions in Plasmas | |
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Physics of Sputtering | |
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Ion Bombardment Modification of Growing Films | |
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Conclusion | |
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Plasma and Ion Beam Processing of Thin Films | |
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Introduction | |
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DC, AC, and Reactive Sputtering Processes | |
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Magnetron Sputtering | |
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Plasma Etching | |
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Hybrid and Modified PVD Processes | |
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Conclusion | |
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Chemical Vapor Deposition | |
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Introduction | |
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Reaction Types | |
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Thermodynamics of CVD | |
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Gas Transport | |
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Film Growth Kinetics | |
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Thermal CVD Processes | |
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Plasma-Enhanced CVD Processes | |
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Some CVD Materials Issues | |
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Safety | |
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Conclusion | |
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Substrate Surfaces and Thin-Film Nucleation | |
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Introduction | |
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An Atomic View of Substrate Surfaces | |
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Thermodynamic Aspects of Nucleation | |
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Kinetic Processes in Nucleation and Growth | |
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Experimental Studies of Nucleation and Growth | |
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Conclusion | |
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Epitaxy | |
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Introduction | |
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Manifestations of Epitaxy | |
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Lattice Misfit and Defects in Epitaxial Films | |
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Epitaxy of Compound Semiconductors | |
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High-Temperature Methods for Depositing Epitaxial Semiconductor Films | |
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Low-Temperature Methods for Depositing Epitaxial Semiconductor Films | |
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Mechanisms and Characterization of Epitaxial Film Growth | |
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Conclusion | |
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Film Structure | |
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Introduction | |
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Structural Morphology of Deposited Films and Coatings | |
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Computational Simulations of Film Structure | |
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Grain Growth, Texture, and Microstructure Control in Thin Films | |
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Constrained Film Structures | |
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Amorphous Thin Films | |
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Conclusion | |
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Characterization of Thin Films and Surfaces | |
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Introduction | |
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Film Thickness | |
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Structural Characterization of Films and Surfaces | |
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Chemical Characterization of Surfaces and Films | |
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Conclusion | |
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Interdiffusion, Reactions, and Transformations in Thin Films | |
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Introduction | |
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Fundamentals of Diffusion | |
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Interdiffusion in Thin Metal Films | |
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Compound Formation and Phase Transformations in Thin Films | |
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Metal-Semiconductor Reactions | |
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Mass Transport in Thin Films under Large Driving Forces | |
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Conclusion | |
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Mechanical Properties of Thin Films | |
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Introduction | |
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Mechanical Testing and Strength of Thin Films | |
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Analysis of Internal Stress | |
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Techniques for Measuring Internal Stress in Films | |
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Internal Stresses in Thin Films and Their Causes | |
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Mechanical Relaxation Effects in Stressed Films | |
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Adhesion | |
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Conclusion | |