Mems and Microsystems Design and Manufacture

Name: Mems and Microsystems Design and Manufacture
Price: 5.02 USD
Availability: InStock
ISBN: 9780072393910

ISBN-10: 0072393912

ISBN-13: 9780072393910

Edition: 2002

Authors: Tai-Ran Hsu

List price: $142.50

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Description:

Hsu's textbook is the first to provide a comprehensive overview of MEMS and microsystems for engineering students.The author provides the background information needed to understand microtechnologies, including solid mechanics, physics, and materials. Design and manufacturing aspects of MEMS are covered extensively; and the author chooses examples and applications from a variety of areas, including telecommunications, biomedical device design, manufacturing systems, mechanical systems and aerospace applications. Packaging aspects are also discussed, in the context of MEMS design and manufacture.

Book details

List price: $142.50
Copyright year: 2002
Publisher: McGraw-Hill Higher Education
Publication date: 11/9/2001
Binding: Hardcover
Pages: 448
Size: 7.25" wide x 9.00" long x 0.75" tall
Weight: 1.848
Language: English

Preface
Suggestions to Instructors
About the Author
Overview of MEMS and Microsystems	p. 1
Working Principles of Microsystems	p. 34
Engineering Science for Microsystem Design and Fabrication	p. 70
Engineering Mechanics for Microsystems Design	p. 96
Thermofluid Engineering and Microsystem Design	p. 163
Scaling Laws in Miniaturization	p. 215
Materials for MEMS and Microsystems	p. 235
Microsystem Fabrication Processes	p. 271
Overview of Micromanufacturing	p. 309
Microsystems Design	p. 333
Microsystem Packaging	p. 389
Bibliography	p. 427
Index	p. 432
Table of Contents provided by Blackwell. All Rights Reserved.