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    Characterization and Metrology for ULSI Technology 2000 International Conference

    ISBN-10: 156396967X
    ISBN-13: 9781563969676
    Author(s): David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, Robert McDonald, W. Murray Bullis
    Description: The worldwide semiconductor community faces increasingly difficult challenges as it moves into the manufacturing of chips with feature sizes approaching 100 nm. Some of the challenges are materials-related, such as transistors with high-k  More...
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    List Price: $185.00
    Publisher: American Institute of Physics
    Binding: Mixed Media
    Pages: 708
    Weight: 4.268
    Language: English

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